
Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
Purge Hose Connection:
1/4” Poly-flo tube fitting and tubing. Connects
the purge valve to the purge fitting on the internal mechanical pump.
Internal Mechanical Pump “Flex” Line:
KF16 size stainless steel flex
hose. Connects the valve block to the internal mechanical pump.
Fore-line “Flex” Line:
KF16 size stainless steel flex hose. Connects the
valve block to the fore-line of the turbo-molecular pump.
Purge Sintered Filter:
Prevents contaminants from being drawn into the
internal mechanical pump through the purge valve.
PUMPS
External Roughing Pump:
Optional equipment with the MS-40. A 7 or
16 CFM dual stage rotary vane (mechanical) pump. The pump is capable
of evacuating from atmosphere to 10
-3
Torr. Assists in providing a
leak test range from 10 to 1 x 10
-3
std cc/sec helium. The pump is
necessary when testing large objects.
Internal Roughing Pump:
A 1.5 CFM dual stage rotary vane (mechanical)
pump. Used to evacuate the test port and test object. Also used to provide
“backing” of the turbo-molecular pump.
High-Vacuum Pump:
A 60 liters/second turbo-molecular pump. In direct
mode testing, the pump allows the MS-40 to measure leak rates as low as
4 x 10
-11
std cc/sec helium. In this mode, the test port is directly connected
to the high-vacuum system.
When performing reverse mode testing, test port gases are channeled to the
fore-line side of the turbo-molecular pump. The turbo-molecular pump acts
to protect the mass spectrometer from these test port gases. Helium
molecules however, due to their relatively small mass, are able to “back
diffuse” through the turbo-molecular pump. Since heavier gas molecules
are trapped by the pump, only helium enters the high-vacuum system,
where the mass spectrometer is able to accurately measure the leak rate.
1109-186-00 Rev. C
3-14
Содержание MS40
Страница 1: ......
Страница 5: ...Figure 1 1 VIC Model MS 40 Portable Automatic Leak Detector 1109 186 00 Rev C 1 2...
Страница 9: ...6 3 4 2 5 7 1 9 8 FIGURE 1 2 INTERNAL ROTARY VANE MECHANICAL PUMP 1109 186 00 Rev C 1 6...
Страница 17: ......
Страница 19: ...FIGURE 2 1 MS 40 USER PANEL 1109 186 00 Rev C 2 2...
Страница 32: ...FIGURE 2 2 MS 40 REAR PANEL CONNECTIONS 1109 186 00 Rev C 2 15...
Страница 35: ...Figure 2 3 MS 40 Hand Held Remote Control 1109 186 00 Rev C 2 18...
Страница 45: ...1109 186 00 Rev C 2 28...
Страница 53: ......
Страница 60: ...1109 186 00 Rev C 3 7...
Страница 69: ......
Страница 85: ...1109 186 00 Rev C 4 16...
Страница 98: ...1109 186 00 Rev C 4 29...
Страница 103: ...1109 186 00 Rev C 4 34...
Страница 104: ...1109 186 00 Rev C 4 35...
Страница 105: ...1109 186 00 Rev C 4 36...
Страница 106: ...1109 186 00 Rev C 4 37...
Страница 107: ...1109 186 00 Rev C 4 38...
Страница 108: ......
Страница 112: ...1109 186 00 Rev C 5 4...
Страница 115: ...1109 186 00 Rev C 5 7...
Страница 118: ......
Страница 122: ......
Страница 136: ...1109 186 00 Rev C b ii...
Страница 137: ...1109 186 00 Rev C b iii...
Страница 138: ......
Страница 160: ......
Страница 162: ......
Страница 164: ...1109 186 00 Rev C f ii...
Страница 165: ...1109 186 00 Rev C f iii...
Страница 167: ...1109 186 00 Rev C f v...
Страница 168: ...1109 186 00 Rev C f vi...
Страница 169: ...1109 186 00 Rev C f vii...