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Veeco MS40, Руководство по эксплуатации и обслуживанию

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Vacuum Instrument Corp.

2099 Ninth Avenue

Ronkonkoma, NY 11779

631.737.0900

 

 
 

Calibrator Valve:

  A three-way valve that connects the calibrator to the 

test port.  With the use of a filter, this valve is also used to vent the 
calibrator to atmosphere. 
 

Fine Valve:

  Connects the test port to the high-vacuum section.  Open during 

Direct Mode testing. 
 

Vent Valve:

  Connects the test port to atmosphere through a sintered metal 

filter. 
 

Rough Valve:

  Connects the inlet port to the internal mechanical pump for 

initial evacuation of the test object. 
 

Fore-line/Reverse Valve:

  Connects the fore-line of the turbo-molecular 

pump to the internal mechanical pump and is also used in 
conjunction with the rough valve for reverse flow testing.  This valve is 
always open on units equipped with an external roughing pump. 
 

Gross Valve:

  Connects the test port to the fore-line of the turbo-molecular 

pump (through a restriction).  Open during Gross Mode testing. 
 

Sniffer Valve:

  Connects the sniffer port to the fore-line of the turbo- 

molecular pump.  Open during sniff testing. 
 

Purge Valve:

  Connects the gas ballast port of the internal mechanical 

pump (through Poly-flo tubing) to atmosphere through a sintered filter.  
Can be connected to dry nitrogen.  Opening this valve assists in “purging” 
the system of trapped gases and “condensable elements” from the pump’s oil. 
 

Test Port:

  A standard KF-25 vacuum connection.  Used to attach test 

objects to the MS-40. 
 

Test Port Pirani:

  A pressure gauge that monitors the test port pressure 

from atmosphere to 10

-3

  Torr. 

 

Vent Filter:

  A sintered metal filter that prevents particles from being 

drawn into the valve block during venting. 
 

Sniff Hose Connection:

  1/4” Poly-flo tube fitting and tubing.  Connects 

the rear sniff QCF to the sniff valve. 

1109-186-00  Rev. C 

3-13

 

 

Содержание MS40

Страница 1: ......

Страница 2: ...h an External Pump 2 22 2 6 Shut Down Procedure 2 25 2 7 Setting Test Parameters 2 25 2 8 Setting Additional Parameters 2 31 2 9 Test Aids Procedures 2 32 Section 3 Theory of Operation 3 1 Introductio...

Страница 3: ...9 General Service Repair 4 21 4 10 Troubleshooting Aids 4 32 Section 5 Parts List 5 1 Introduction 5 1 5 2 Recommended Spare Parts for the MS 40 5 2 5 3 Other Components 5 5 Appendix A Glossary of Te...

Страница 4: ...S 40 details the controls necessary to operate the MS 40 both during normal operation of the unit as well as when placed in Service Mode All external connectors and their applicability to the unit and...

Страница 5: ...Figure 1 1 VIC Model MS 40 Portable Automatic Leak Detector 1109 186 00 Rev C 1 2...

Страница 6: ...ance procedures in this manual in order to maximize the efficiency of the unit as well as minimize downtime caused by improper service and repair 1 2 Unpacking Inspection The MS 40 is shipped in a spe...

Страница 7: ...itted with two blanks that cover its intake and filter connections Remove these blanks and attach the flex hosing and filter refer to Figure 1 2 for a diagram illustrating the proper installation for...

Страница 8: ...replace the right side panel and close the front and rear doors NOTE The MS 40 Leak Detector is factory tested and calibrated prior to shipment and once installed is ready for use An Installation Kit...

Страница 9: ...6 3 4 2 5 7 1 9 8 FIGURE 1 2 INTERNAL ROTARY VANE MECHANICAL PUMP 1109 186 00 Rev C 1 6...

Страница 10: ...ffer assembly for sniff testing or a test cup for pressure bombing testing will be necessary All of these items are available directly from Vacuum Instrument The recommended ambient temperature range...

Страница 11: ...l Calibrator Helium 4 1 x 10 8 to 3 x 10 8 std cc sec air equivalent with integral solenoid valve Testable Masses Helium Mass 3 or 4 Tuning Automatic Calibration Automatic for Helium 4 using an intern...

Страница 12: ...he 100 to 10 3 range is only available when the optional external pump has been installed Measurement Units Pressure millitorr or millibar selectable with a switch located underneath the Service Panel...

Страница 13: ...lium Reverse 10 x 10 4 to 6 x 10 10 Direct 10 x 10 5 to 6 x 10 11 ELECTRONICS USER INTERFACE System Controller Microprocessor based four integrated boards used A controls the unit s computer logic and...

Страница 14: ...detected the unit will range back to the appropriate decade The MS 40 uses two types of automatic testing an automatic test mode with automatic ranging and an automatic test mode with manual ranging I...

Страница 15: ...Mode WARNING The Service Mode of the MS 40 is intended for use by qualified Vacuum Instrument personnel or Users specifically trained by Vacuum Instrument Under no circumstances should any individual...

Страница 16: ...ration standard e g 2 x 10 8 std cc sec 24 C of the internal calibrator the leak rate of the test object a numeric value the same leak rate as displayed by the bar graph on the User Panel the pressure...

Страница 17: ......

Страница 18: ...g Operating the Leak Detector 3 Testing Aids Procedures While this chapter contains sufficient information to operate the MS 40 leak detector we suggest that you read Chapter 3 Theory of Operation pri...

Страница 19: ...FIGURE 2 1 MS 40 USER PANEL 1109 186 00 Rev C 2 2...

Страница 20: ...std cc sec the Leak Rate Bar Graph will indicate 3 while the Numeric Display will indicate the number 7 The second function of the display has been programmed to provide error codes when a system faul...

Страница 21: ...either arrow button will cause the unit to sequentially pass through one or more decades The numeric display the exponent of the leak rate will indicate the change Also when leak testing in the autom...

Страница 22: ...rvice Panel When the unit has been placed in Service Mode pressing the SNIFF valve momentary switch opens the Sniffer Valve WARNING Never operate the MS 40 in Sniff Mode without the optional Sniffer A...

Страница 23: ...ated on the upper right side of the A circuit board mounted on the inside of the unit s rear door AMP GAIN Amplifier Gain When this function is selected the alphanumeric display indicates the setting...

Страница 24: ...he peak tuning voltages will retune the mass spectrometer Improper tuning will greatly effect the accuracy and reliability of the leak detector While the unit is in Standard Mode pressing either the l...

Страница 25: ...omentary switches DELAY Seven delay settings are available and may be set while the unit is in Standard mode D1 Fine Direct Crossover Delay The time delay after Crossover 2 has been reached and the on...

Страница 26: ...ode Prevents unit from auto ranging and crossing over into Reverse flow mode before a gross leak is detected Useful when testing large parts that may have a long helium response time D6 Minimum Rough...

Страница 27: ...on and displays the error code The unit will display the code until the problem is resolved This Function is also selectable when using the SELECT momentary switches on the Service Panel If in Standar...

Страница 28: ...e stored in the unit s computer for the internal calibrator This parameter may be altered only in Service Mode by using the SET momentary switches This parameter should only be changed when the intern...

Страница 29: ...and sec and the AUDIO arrow keys to set the new time for the unit SELECT Up Down Arrow Keys Momentary switches that allow the user to scroll through the sixteen functions located on the Service Panel...

Страница 30: ...ned on when the high vacuum section is at or near atmosphere the filament will quickly burn out FIL 1 2 Filament 1 or 2 Momentary Switch By pressing this switch the user can toggle between Filament 1...

Страница 31: ...to initiate the unit s Auto Calibrating function when using Mass 4 helium Note that this function uses the unit s internal calibrator The LED on the switch is lit while this sequence is in progress Se...

Страница 32: ...FIGURE 2 2 MS 40 REAR PANEL CONNECTIONS 1109 186 00 Rev C 2 15...

Страница 33: ...exhaust that the MS 40 produces during testing to be channeled directly to a user provided exhaust system Standard 3 8 inch tubing is used between the detector and the exhaust system Must be internal...

Страница 34: ...ak rate testing results of every leak rate measurement cycle The port itself is a standard RS 232C connector PRINTER PORT Allows a standard 36 25 pin PC compatible printer cable to be connected to the...

Страница 35: ...Figure 2 3 MS 40 Hand Held Remote Control 1109 186 00 Rev C 2 18...

Страница 36: ...h to turn on the filament NOTE During the start up procedure all LED s on the User Panel will be tested by being sequentially lit When the Start up mode has been completed the Automatic Ranging indica...

Страница 37: ...ions will then strike the collector plate causing an electron flow equivalent to a minute current which and amplified so that the measurement of the leak is displayed on the User Service Panel An alte...

Страница 38: ...2 The rough valve will close the fine valve will open and the leak detector will range downward to the 10 10 std cc sec range 9 If a leak is not found the unit will continue to test at this level unt...

Страница 39: ...ossover 1 the unit will begin reverse mode testing The external rough valve and gross valve will close the internal rough valve will open and the leak detector will range downward from the 10 4 std cc...

Страница 40: ...me surrounding air that acts to dilute the helium leak tracer Also note that sniffing is primarily a qualitative form of testing rather than a quantitative test it is best used for locating leaks rath...

Страница 41: ...40 is in the Standard mode not the Sniff mode 3 Select either Automatic or Manual ranging If Manual ranging is chosen set the MS 40 for the 10 9 range or higher do not set it for the 10 10 range In e...

Страница 42: ...MS 40 s vacuum system valves as controlled by the system computer The purpose of these timing adjustments and their settings are explained below Please also refer to Chapter 3 Theory of Operation for...

Страница 43: ...mode testing When the unit determines that the leak is smaller than a reverse flow leak the fine valve opens the internal rough valve closes and the unit crosses over into direct flow testing To reset...

Страница 44: ...the Accept Reject set point press either of the SET momentary switches The alphanumeric display will change either down or up in correspondence with the number of key presses of the left or right swi...

Страница 45: ...1109 186 00 Rev C 2 28...

Страница 46: ...or to opening the Fine valve reduces the possibility of a crossover pressure burst and limits the chance of burning out the mass spectrometer filament prematurely D2 Direct Rough Valve Close Delay Occ...

Страница 47: ...e extended pumping D6 can be set from 1 0 to 999 9 seconds the factory default setting is 1 0 second D7 Reverse Rough Close Delay Keeps external rough valve open for specified amount of time after rev...

Страница 48: ...when unable to otherwise properly calibrate the unit Five separate gains are available G1 refers to the gain while the unit is in gross flow mode G2 refers to the gain while the unit is in reverse flo...

Страница 49: ...trometer Helium Air Measurement This toggle switch allows the user to select either air equivalent or helium leak rate readings This function is only available in Service Mode Mass 3 4 Helium This tog...

Страница 50: ...hen the Zero function is activated it does not inhibit ranging upward during testing The Zero function is canceled at the end of a test cycle i e when the VENT button is pushed it can also be cancelle...

Страница 51: ...Panel The alphanumeric display of the Service Panel indicates the calculated temperature compensated value of the internal leak rate standard The leak rate bar graph indicates the measured value of th...

Страница 52: ...leak rate standard Note that consistent differences greater than 15 may indicate an improperly tuned mass spectrometer or a fault within the unit Tune Pressing the TUNE momentary switch initiates an...

Страница 53: ......

Страница 54: ...industrial and military products and processes require hermetic sealing In general these products include equipment exposed to pressures above or below those of its immediate environment vacuum equipm...

Страница 55: ...e most reliable sequence is to first measure the total leakage of a test object and then if necessary determine the location of individual leaks A leak rate specification should take into account the...

Страница 56: ...to conduct an accurate leak test for an object designed to contain liquid since a calibrated helium gas standard is an integral part of the MS 40 Of all the instruments and devices used for leak dete...

Страница 57: ...trometer Therefore crossover can occur at much higher pressures in reverse flow mode than in direct flow mode For the MS 40 the Gross Mode Leak measurement range is as 10 to 1 x10 3 std cc sec Without...

Страница 58: ...e high vacuum section and therefore the mass spectrometer This allows for much higher sensitivity and ultra clean testing in comparison with reverse flow mode but requires a much lower crossover press...

Страница 59: ...is completely inert and will not contaminate a test object Helium does not contaminate or desensitize its own detector as is common with detectors using other tracer gases Helium molecules are small m...

Страница 60: ...1109 186 00 Rev C 3 7...

Страница 61: ...sperse throughout the confines of the Hi Vac section As gas molecules enter the ion source chamber of the mass spectrometer an electrically heated filament provides a source of electrons that collide...

Страница 62: ...on on how to adjust this parameter or by changing the delay setting refer to Section 2 7 for detailed information on delay parameters In this case delay refers to either delaying the opening of the fi...

Страница 63: ...a reference During tuning the unit s computer controls the vacuum system s valves and adjusts the various voltages of the mass spectrometer to obtain an optimum response to the helium signal from the...

Страница 64: ...object plate The end result of this arrangement is to accelerate the gas ions into a well defined mono energetic beam Mass Spectrometer Magnets Since the gas entering the spectrometer contains atoms a...

Страница 65: ...low as low as 1 x 10 15 Amperes The current flow is detected and amplified within the collector The first stage of amplification is within the high vacuum environment to assure stability minimize the...

Страница 66: ...roughing pump Gross Valve Connects the test port to the fore line of the turbo molecular pump through a restriction Open during Gross Mode testing Sniffer Valve Connects the sniffer port to the fore...

Страница 67: ...to 1 x 10 3 std cc sec helium The pump is necessary when testing large objects Internal Roughing Pump A 1 5 CFM dual stage rotary vane mechanical pump Used to evacuate the test port and test object Al...

Страница 68: ...small percentage of the test port gas to enter the high vacuum section and reach the mass spectrometer If helium is detected the signal is amplified by the Gross Mode Gain G1 to correct the measuremen...

Страница 69: ......

Страница 70: ...eration Failure to follow this precaution may lead to severe injury or death WARNING The Service Mode of the MS 40 is intended for use by qualified VIC personnel or Users specifically trained by VIC U...

Страница 71: ...from the Service Mode the MS 40 requires fifteen seconds to accurately acquire background and other system measurements During this time the system computer will prohibit any testing from occurring a...

Страница 72: ...or s calibration may not be as accurate as during normal operation When using the MS 40 during warm up perform the Cal Check function to ensure the integrity of the unit s measurement accuracy Another...

Страница 73: ...O ring should be inspected frequently at least once each week To access the O ring remove the KF clamp and centering ring atop the test port With a nonmetallic instrument or by hand remove the O ring...

Страница 74: ...ntaminated with helium Refer to Section 4 5 for the information on indications of helium based oil contamination Check Exhaust Filter on Internal Pump The internal pump has a disposable exhaust filter...

Страница 75: ...rface 3 Place a funnel directly underneath the drain on the pump to collect the drained oil into a suitable container Open the drain plug and wait for the oil to drain out of the pump Once the oil has...

Страница 76: ...ollect the oil removing the oil in this manner may cause the used oil to splash within its container Once the oil has been completely drained from the pump replace the drain plug 4 On the top of the p...

Страница 77: ...e unit is reaching its limit Verify tuning by performing the Tune function as described in Section 2 9 If after the Tune function has been performed the gain value is not lower than previously reporte...

Страница 78: ...esponding to repeated exposure to gases drawn into its vacuum system Matter contained in these gases tend to contaminate the mass spectrometer and reduce its sensitivity The unit s computer senses thi...

Страница 79: ...om testing in its most sensitive ranges An unstable leak rate will complicate testing and will make the tuning and calibration functions unreliable The gas ballast may be opened periodically to de gas...

Страница 80: ...be entirely effective If the background and instability problems are not sufficiently solved through these measures change the pump s oil refer to Section 4 4 for this procedure 4 6 Venting the Vacuu...

Страница 81: ...valve by pressing the momentary switch on the Service Panel The turbo molecular pump will rapidly decelerate this produces a highly distinctive noise 8 Open the fore line valve by pressing the moment...

Страница 82: ...test chambers etc are generally appropriate for cleaning MS 40 vacuum components WARNING At all times the inhalation of cleaning fluid vapors must be avoided Also extreme care should be taken with fl...

Страница 83: ...at the time of re assembly recommended or carefully wiped clean with a lint free material and inspected for surface damage of any kind before they are used again If a new O ring is used it should be w...

Страница 84: ...trical short Rinse the source in freon and clean it ultrasonically Install new filaments as described in Section 4 9 5 The collector may be cleaned as follows a Remove the collector s O ring and wipe...

Страница 85: ...1109 186 00 Rev C 4 16...

Страница 86: ...0 0130 168 00 Screw vented 2 56 x 3 16 11 0011 024 00 O Ring 1 1 8 x 1 16 12 Commercial Lock washer Split 6 13 Commercial Screw Socket Head 6 32 x 1 2 14 Commercial Lock washer Split 6 15 Commercial S...

Страница 87: ...e to record the position of each clamp 8 Lift off the manifold and the centering ring between the pump and the manifold Place on a clean flat surface near the unit 9 Lift off the turbo molecular pump...

Страница 88: ...ve are closed Verify that the MS 40 is in the Standard mode 2 Open the rear panel To open the rear panel turn the captive screw at the top of the panel 1 4 turn counterclockwise and gently lower the d...

Страница 89: ...rew at the top of the panel 1 4 turn counterclockwise and gently lowering the door NOTE The test port Pirani must be calibrated prior to calibration of the fore line Pirani 3 Using either of the SELEC...

Страница 90: ...he spectrometer As there are small physical differences from source to source this current will not be exactly the same for each machine and must be calibrated This is done initially at the factory bu...

Страница 91: ...ould have a resolution of 0 1 C 4 On the A board mounted on the interior of the rear door adjust the R53 potentiometer at the bottom right of the board until the temperature reading on the alphanumeri...

Страница 92: ...plastic or other non metallic instrument Do not use metal or any other hard instruments as they may scratch the O ring groove Wipe each O ring with a lint free cloth and check each carefully for nick...

Страница 93: ...s connected to the upper prong the striped wire to the lower prong rough valve the white wire to the upper prong the striped wire to the lower prong and the green and yellow wire to the outer prong 5...

Страница 94: ...ed in Section 4 6 2 Open the rear panel by turning the captive screw at the top of the panel 1 4 turn counterclockwise and gently lowering the door 3 The gross valve is labeled and is mounted near the...

Страница 95: ...ly lowering the door 3 The valves are labeled and mounted on the valve block Remove the lower left and upper right screws to access the internal valve mechanism 4 While using lint free gloves remove t...

Страница 96: ...ently pull off the source electrical connector 3 Loosen the four screws that hold the heat sink onto the source assembly Remove the four screws and pull the heat sink off the source assembly 4 Loosen...

Страница 97: ...ided on the ceramic block 12 Place the ceramic spacer on the source assembly Reattach the spacer with the nuts removed in Step 8 13 Slide the filament up or down in the slots of the ceramic block unti...

Страница 98: ...1109 186 00 Rev C 4 29...

Страница 99: ...Reattach the source assembly with the two screws removed in Step 4 19 Reattach the heat sink that covers the source assembly with the screws removed in Step 3 20 Reattach the source electrical connect...

Страница 100: ...placement The MS 40 contains three circuit boards in the unit and one circuit board in the optional hand held remote Circuit Board A is mounted on the inside of the unit s rear panel Circuit Board B i...

Страница 101: ...aptive screw at the top of door 1 4 turn and then gently lowering the door 2 Loosen and remove the screws on the shield that covers the board Remove the shield 3 Remove all of the electrical connector...

Страница 102: ...rm the function The Error Code will appear on the User Panel Specifically the error code EE appears in the numeric display of the User Panel At the same time the alphanumeric display indicates the spe...

Страница 103: ...1109 186 00 Rev C 4 34...

Страница 104: ...1109 186 00 Rev C 4 35...

Страница 105: ...1109 186 00 Rev C 4 36...

Страница 106: ...1109 186 00 Rev C 4 37...

Страница 107: ...1109 186 00 Rev C 4 38...

Страница 108: ......

Страница 109: ...e illustrated in Figures 5 1 and 5 2 Both illustrations contain item numbers for the replaceable components of the sub system Each illustration has an accompanying table where the numbered components...

Страница 110: ...Rebuild Kit 0126 186 00 Collector Assembly 0136 051 00 Filament Kit 0103 141 01 Internal Rough Pump Pump 110 120v 50 60Hz 1660 362 00 Pump 220 240v 50 60Hz 1660 362 01 External Rough Pump Option Kit...

Страница 111: ...00 Pump Exhaust Filter 1680 055 00 Filament Kit Box of 5 0103 141 01 High Vacuum Grease 1990 352 00 Mechanical Pump Oil 1990 924 00 Tool Kit 0137 806 00 LED Start Switch 877230 Fuse 90 115V 869150 Fus...

Страница 112: ...1109 186 00 Rev C 5 4...

Страница 113: ...4 Valve Block Assembly 5 1620 735 00 Elbow 1 4 NPT M F 6 0137 702 00 Pirani Gauge Fore line 7 0137 206 00 Manifold Fore line 0011 115 00 O Ring Turbo molecular Pump Fore line 8 1621 239 02 Clamp VF16...

Страница 114: ...washer 21 0137 016 00 Calibrator Body 8315 226 00 Calibrator Temperature Sensor Assembly 22 Calibrator Valve Block 23 1890 288 00 Calibrator Valve 1890 154 00 Filter Sintered 24 Commercial Screw 8 32...

Страница 115: ...1109 186 00 Rev C 5 7...

Страница 116: ...Pump Option Kit P N 0137 805 00 1331 776 00 Screw Pan Head M3 x 5 45mm 1g 0019 014 00 Replacement O Ring Gross Valve Body 0019 006 01 Replacement O Ring Gross Valve Manifold 0019 013 01 Replacement O...

Страница 117: ...3 01 Replacement O Ring Purge Valve Manifold 15 Commercial Screw 10 32 x 1 3 4 Socket Head Cap Lock washer 10 16 1620 726 00 Elbow 1 8 NPT to 1 4 Tube Purge 17 1620 726 00 Elbow 1 8 NPT to 1 4 Tube Sn...

Страница 118: ......

Страница 119: ...ure usually atmospheric pressure on the inlet side and gas at a pressure on the exit side which is low enough to have negligible effect on the rate of flow 5 Leak Detector A device for detecting and l...

Страница 120: ...expressed in suitable terms exhibited by the detector in the absence of an output due to tracer gas 15 Background In the case of a leak detector the spurious output expressed in suitable terms due to...

Страница 121: ...e further leak detection by means of a probe 25 Helium Drift In the case of leak detection with a helium probe the drift of helium to a leak or permeable gasket located at a point sufficiently remote...

Страница 122: ......

Страница 123: ...pectrometry Type are available by writing to Vacuum Instrument Corporation Copyrights 1972 1973 by the American Vacuum Society AVS Standard 2 1 3 1 BACKGROUND 3 1 1 General In general background is th...

Страница 124: ...h permits gas flow by permeation of the gas through a nonporous wall For helium this may be a wall of glass quartz or other suitable material 3 4 1 3 Molecular Leak A leak through which the mass rate...

Страница 125: ...3 4 1 3 Consequently helium mol wt 4 passes through such leaks more rapidly than air mol wt 29 and a given flow rate of helium corresponds to a smaller flow rate of air In this recommendation helium f...

Страница 126: ...a helium air mixture of known helium concentration ratio 5 Test Procedure Minimum Detectable Leak 5 1 DRIFT AND NOISE OBSERVATION 5 1 1 The output of the leak detector is connected to the recorder th...

Страница 127: ...h occurs less frequently than once in any 5 min interval 5 3 MINIMUM DETECTABLE SIGNAL The minimum detectable signal is taken to be equal to the sum of the absolute values of the drift and of the nois...

Страница 128: ...ass spectrometer tube may be turned off at this point 5 4 2 5 When the atmospheric air present between the plug and the inlet valve has been evacuated the pump valve is closed 5 4 2 6 The inlet valve...

Страница 129: ...ec 5 4 3 14 5 4 2 12 Close the inlet valve 5 4 2 13 Open the vent valve 5 4 2 14 Remove only the plug from the inlet line all connections are to remain in place 5 4 2 15 Close the vent valve 5 4 3 SEN...

Страница 130: ...r the sensitivity setting the output reading in scale divisions is noted If the leak detector has been set at reduced sensitivity the reading should be converted to the equivalent scale divisions for...

Страница 131: ...ed signal Sec 5 4 3 13 and the spurious signal correction in 5 4 2 11 The sensitivity is calculated by the formula below and should always be stated together with the response time T Sensitivity with...

Страница 132: ...a reference base line The specification of such a reference line is an important function of this standard In some discussions the symbol m or M is used for peak width rather than W The units of W ar...

Страница 133: ...ear mass scale To do this it is assumed that for a sufficiently small range of mass numbers the abscissa is actually linear in mass number To convert from the abscissa scale to mass units the followin...

Страница 134: ...negligible if each has an input resistance 1000 times that of their common voltage source or if the recorder draws 1 1000 as much current as the indicator While some recorders have automatic decade s...

Страница 135: ...Y 11779 631 737 0900 Unit Conversion Tables The following tables are provided for easy conversion of values between commonly used units of pressure and leak rate Table A Pressure Conversion Chart Tabl...

Страница 136: ...1109 186 00 Rev C b ii...

Страница 137: ...1109 186 00 Rev C b iii...

Страница 138: ......

Страница 139: ...ter g Certain packets contain a fixed number of bytes and some have a dynamically varying length MS 40 Software revisions 3 8 and later made the fields fixed in length any only used numbers The descri...

Страница 140: ...by 1 to 6 numbers Test port Pressure measured in Millitorr from 0 to 760000 Millitorr e g 200 200 millitorr e g 50000 50000 millitorr In software revisions 3 8 and later this field is fixed at 7 chara...

Страница 141: ...id Ready ON Testing OFF Start OFF I Followed by 1 to 2 numbers Present State of the leak detector In software revisions 3 8 and later this field is fixed at 3 characters with states 0 9 preceded by a...

Страница 142: ...nged due to the addition of 2 more states I 2 numbers 00 First Power 01 Power Up 02 Power Up 03 Power Up States 4 11 are for Vacuum Mode Auto Ranging 04 Standby 05 Standby 06 Roughing Testport 07 Gros...

Страница 143: ...nd later this field is fixed at 5 characters J 4 numbers e g 2308 2 3 x 10 8 atm cc sec A mantissa of 10 0 will never be sent K Followed by 1 to 3 numbers Crossover 2 or Direct Flow Crossover in milli...

Страница 144: ...e Communications Error 13 Rough Time Exceeded 18 Printer Error 22 Temperature Too Low 23 Cannot Find Helium Peak 24 Gain Too High 26 Turbo Pump Failure 30 Hand Held Remote Communications Error 33 Repe...

Страница 145: ...fixed at 3 characters Q 2 numbers R Followed by 1 to 2 numbers For VIC s internal use only In software revisions 3 8 and later this field is fixed at 3 characters R 2 numbers S Followed by 4 to 5 char...

Страница 146: ...nal Calibrator in atm cc sec when state of leak detector is in any state except I 47 When the leak detector is in state I 47 this field will be the temperature compensated value of the internal calibr...

Страница 147: ...ds e g 21 7 21 7 seconds In software revisions 3 8 and later this field is fixed at 5 characters Z 4 numbers e g 0010 1 0 seconds Followed by 3 to 4 characters Vent Valve Open Delay D3 in Tenths of se...

Страница 148: ...rr FLASH 3 1 and EPROM 1 4 In software revisions 3 8 and later this field is fixed at 9 characters 9 numbers It now appends ILD auto manual mode status to the end e g 140031141 Filament On He4 Air Equ...

Страница 149: ...ing Time D5 in Tenths of seconds e g 0 1 0 1 seconds e g 14 2 14 2 seconds In software revisions 3 8 and later this field is fixed at 5 characters a 4 numbers e g 0100 10 0 seconds b Followed by up to...

Страница 150: ...st In the serial stream in software revisions prior to Rev 4 1 g Followed by 6 numbers first 5 are the leak rate and the last is reject status Previous Test Final Leak Rate Value Reject Status measure...

Страница 151: ...o all packets the command E1Z should be sent To stop a specific packet from being sent the Gab0Z command can be sent to the MS 50 where ab is the packet number i e if ab 02 then the 2nd packet or C pa...

Страница 152: ...packet s to be sent continuously S0Z will halt packet transmission Note The packets are transmitted in the following order PACKET PACKET LETTER PACKET PACKET LETTER 00 A 19 U 01 B 20 V 02 C 21 W 03 D...

Страница 153: ...will be sent to control normal operation cycling of the MS 40 leak detector Normal starting and stopping of test cycles will be controlled remotely If the remote computer is making leak test decision...

Страница 154: ...D F K M R and are all terminated by the letter Z The numbers in the middle make up the desired command All keypress commands start with the letter K and end with the letter Z Each keypress command wo...

Страница 155: ...em delays the PC must send a command that starts with a D followed by 5 numbers and ends with a Z The first number is the delay number 1 2 3 4 5 6 7 and the last 4 numbers make up the desired delay in...

Страница 156: ...the desired crossover pressure in millitorr For a REVERSE CROSSOVER 1 of 350 millitorr the following string must be sent F10350Z For a DIRECT CROSSOVER 2 of 25 millitorr the following string must be...

Страница 157: ...iffer slightly for revision 3 8 and later As an example let s go through the sequence of a remotely controlled leak test cycle First we monitor the present state packet I We wait for the MS 40 to powe...

Страница 158: ...1 or 12 This will cause the MS 40 to change to either state 18 19 22 or 23 If the leak detector is set for manual ranging the Sniffer Mode standby states would be 22 or 23 Once the correct standby sta...

Страница 159: ...RS232 on the rear of the leak detector MS 40 9 pin Connector Computer 25 Pin Connector 1 6 20 2 2 3 3 4 6 8 5 7 7 5 8 4 9 not connected 22 MS 40 9 pin Connector Computer 9 Pin Connector 1 6 4 2 3 3 2...

Страница 160: ......

Страница 161: ...5 1 or later 1 Pump Select Edwards DOWN Pfeiffer UP Rev 7 2 or later Revision Switch 8 RS232 Leak Rate Mantissa X X UP X XX DOWN Software Rev 7 2 or later 7 Tracer Gas Clean Up Disable Up Enabled Dow...

Страница 162: ......

Страница 163: ...ns quick reference charts for the following functions and displays The User Control Panel The Service Panel The Alphanumeric Display MS 40 Error Codes Periodic Maintenance Functions A more complete de...

Страница 164: ...1109 186 00 Rev C f ii...

Страница 165: ...1109 186 00 Rev C f iii...

Страница 166: ...n G4 is Sniff gain G5 is Power Sniff gain G2 G3 are set by computer G2 G3 gains cannot be changed in Standard mode G1 G4 G5 may be changed in Standard mode during leak testing in the Gross mode or Sni...

Страница 167: ...1109 186 00 Rev C f v...

Страница 168: ...1109 186 00 Rev C f vi...

Страница 169: ...1109 186 00 Rev C f vii...

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