Veeco Dimension 3100, Руководство пользователя

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Calibration
X-Y Calibration using Capture Calibration and Autocalibration
Rev. D Dimension 3100 Manual 321
17.5 X-Y Calibration using Capture Calibration and
Autocalibration
17.5.1 Capture Calibration
Scanners are calibrated by setting parameters in the NanoScope software using the Capture
Calibration command. The basic calibration procedure using version 5.XX software and a 10-
micron calibration reference (see Figure 17.1e ) is described below.
1. With the Scan rate set to 2.44 Hz and Number of samples parameter to 256 , a full Capture
Calibration requires approximately 70 minutes.
Note: Increasing the Number of samples or decreasing the Scan rate significantly
increases the required time.
2. Using the mouse, click on Realtime > Capture > Calibration . The Capture Calibration
dialog box lists twelve parameters used in the calibration procedure (see Figure 17.5a ).
Figure 17.5a Capture Calibration Prompt
3. If this is a first-time calibration, or if the microscope’s calibration has not been checked
within the last three months, verify that all parameters are selected.
4. Click on
CAPTURE
to initiate the automatic calibration routine.
Note: The microscope begins an automatic series of scans on the reference which
require approximately one hour to complete. During each scan, the scanner
moves the piezo using carefully calculated movements. Many of these
movements are unusual, giving rise to a variety of images which do not
resemble the normal reference. For example, pits may resemble trenches and
features may be presented at various angles.
5. As each routine is executed, adjust the scan slightly to optimize the calibration image using
the Capture Control dialog box displayed on the control monitor throughout the calibration
routines (see Figure 17.5b ).
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