Veeco Dimension 3100, Руководство пользователя

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Calibration
Calibration Setup
312 Dimension 3100 Manual Rev. D
17.1.2 Calibration References
As described above, each scanner exhibits its own unique sensitivities; therefore, it is necessary to
precisely measure these sensitivities, then establish software parameters for controlling the scanner.
This task is accomplished with the use of a calibration reference (see
Figure 17.1e ).
Figure 17.1e Silicon Calibration Reference
A calibration reference consists of a silicon substrate having a regular series of pits, each 200nm
deep, which is plated with platinum. Pits are spaced apart on 10µm centers. Other similar surfaces
are available with different dimensions. Atomic-scale calibrations are generally carried out with
mica or graphite, which exhibit very regular atomic lattices. Calibration references serve as the
primary tool by which SPMs are calibrated. They serve as measuring sticks with which to gauge
scanner displacement for a given voltage.
The SPM should be capable of measuring a calibration reference with an accuracy of 2 percent or
better while scanning at the maximum
Scan size setting. Using fine calibration techniques, it is
possible to calibrate the SPM with even greater accuracy.
17.2 Calibration Setup
17.2.1 Check Scanner Parameter Values
1. If the system's original scanner parameters are deleted, copy the scanner parameters from the
software CD shipped with every system. Individually purchased scanners are shipped with a
head/scanner disk containing backup files or a hard copy of the scanner parameters.
2. In the event that files are not found, fax or call Veeco for scanner calibration records.
200nm deep
10µm 10µm