Veeco Dimension 3100, Руководство пользователя

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Calibration
X-Y Calibration using Capture Calibration and Autocalibration
322 Dimension 3100 Manual Rev. D
Figure 17.5b Capture Control Prompt
Note: The capture status will begin at skip 2. The program skips the current scan plus
one more before capturing an image for later calibration. This allows hysteresis
and drift to settle out when the scan changes direction and size between images.
6. If the scan has not settled out by the time the capture status changes to On , click on
SKIP
to
increment the capture to skip 1, skip 2 or skip 3.
Note: Do not click on Abort unless you want to stop the entire Capture Calibration
program.
7. If portions of features are missing, or if the image is blank, click repeatedly on Adjust Y
Offset > Up or Down to adjust the scan until more of the features are imaged. Features
should extend across as much of the displayed image as possible (see Figure 17.5c ).
8. Once the image is optimized, allow the software to capture the entire image without
disturbing it. The software automatically indexes to the next image. Once all calibration
images are obtained, the software prompts the user that it is finished.
Figure 17.5c Improved Calibration Image
Note: After the first four images with the diagonal stripe pattern are captured, you can
leave the system unattended while the program continues to completion. Some
of the following images appear stretched in one dimension; however, this is
normal.
010
28.37
µµµµ
m
Partial Calibration Image Improved Calibration Image