VAT 64246-UEHC-0001, Инструкции по установке, эксплуатации и обслуживанию

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Series 642 DESCRIPTION OF PRODUCT
603685EA Edition 2013-08-22 7/73
1.6.2 Valve unit
Valve unit
Pressure range at 20 C
1 × 10E-8 mbar to 2 bar (abs)
Leak rate to outside at 20 C
1 × 10E-9 mbar l/s
Leak rate valve seat at 20 C
1 × 10E-9 mbar l/s
Cycles until first service
- Throttling cycles (open - max. throttle - open)
- Isolation cycles (open - closed - open)
2’000’000
(unheated and under clean conditions)
200’000 (unheated and under clean conditions)
Admissible operating temperature +10°C to +150°C
Mounting position valve sit (valve seat to face chamber is recommended)
Process side materials body Stainless steel 316L (1.4404 or 1.4435)
plate Stainless steel 316L (1.4404 or 1.4435)
other parts Aluminum: A356 (3.2371)
Stainless steel: 301 (1.4310), 303 (1.4305), 304 (1.4301
or 1.4303), 316L (1.4435 or 1.4404), A2 (304)
Seals plate FKM (e.g. Viton®)
rotary feedthrough FKM (e.g. Viton®)
bonnet (vulcanized) FKM (e.g. Viton®)
Max. differential pressure on plate during isolation 2 bar in either direction
Max. differential pressure on plate
during opening and throttling
30 mbar
Min. controllable conductance
(N
2
molecular flow)
2 l/s
Max. controllable conductance
(N
2
molecular flow)
12000 l/s
Dimensions Refer to dimensional drawing of specific valve ordering
number
(available on request)