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Series 642

APPENDIX

605403ED

Edition 2017-11-24

93/94

13

Appendix

No information entered on time.

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Содержание 642 Series

Страница 1: ...id for the valve ordering number s 642 GC 1 sensor input 642 GE 2 sensor inputs 642 AC 1 sensor input 15V SPS 642 AE 2 sensor inputs 15V SPS 642 HC 1 sensor input PFO 642 HE 2 sensor inputs PFO 642 CC...

Страница 2: ...duplicated or distributed without written permission from VAT Offenders are liable to pay damages The original VAT firmware and updated state of the art versions of the VAT firmware are intended for u...

Страница 3: ...edure 18 4 3 Tightening torque 19 4 3 1 Mounting with centering rings 19 4 3 2 Mounting with O ring in grooves 20 4 4 Admissible forces 21 4 4 1 Requirements to sensor connection 22 4 5 Electrical con...

Страница 4: ...7 Operation during power up 67 5 8 Behavior in case of power failure 67 5 9 Operation under increased temperature 67 6 Trouble shooting 68 7 Maintenance 70 7 1 Maintenance intervals 70 7 2 Maintenanc...

Страница 5: ...product for clean and dry vacuum applications only Other applications are only allowed with the written permission of VAT 1 3 Used abbreviations Abbreviation Description CPA Control Performance Analyz...

Страница 6: ...sor power supply 2 642 A 642 C Input Output 24 VDC 1500 mA max 15 VDC 5 1000 mA max connector POWER connector SENSOR Sensor power supply 2 642 G 642 H Input Output 24 VDC resp 15 VDC same as input but...

Страница 7: ...0 VDC or 70 V peak max 0 5 ADC or 0 5 A peak max 10 W max connector INTERFACE Analog outputs 3 0 10 VDC 1 mA max connector INTERFACE PFO 4 battery pack 642 C 642 H Charging time Durability 2 minutes m...

Страница 8: ...ical position with extended closing time fewer cycles Process side materials body plate Stainless steel 304 1 4301 other parts Stainless steel 301 1 4310 304 1 4301 420 1 4034 420D 1 4037 430 1 4016 S...

Страница 9: ...ion Operating Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system They must be stored together with the other documentation and acce...

Страница 10: ...ions WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the described work 2 4 Safety labels Label Part...

Страница 11: ...11 Rotary feed through seals 6 Crank bolt 3 2 Function The valve gate 1 acts as a throttling element and varies the conductance of the valve opening Actuation is performed with a stepper motor and co...

Страница 12: ...differences Example Downstream control 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable 6 Controller and actuator 7 Cable to remote control unit 8 Cable to power supply 9 HV Pu...

Страница 13: ...is admitted at the same time the pressure can be controlled in two ways 1 Downstream control standard The pressure is controlled by changing the conductance of a control valve between pump and proces...

Страница 14: ...sical overstraining Use a crane to lift valves DN 200 8 and larger Make sure that the supplied products are in accordance with your order Inspect the quality of the supplied products visually If it do...

Страница 15: ...rect handling Only qualified personal are allowed to install the valve into the vacuum system NOTICE Wrong connection Wrong connection may result in damage of controller or power supply Connect all ca...

Страница 16: ...space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below sample picture Overview table DN to required distance d for mainten...

Страница 17: ...on overview System 1 Valve 2 Process chamber 3 Gas inlet 4 Pressure sensor s 5 Sensor cable s 6 Cable to Logic remote control unit 7 Cable to power supply 8 Controller 9 Connection cable controller ac...

Страница 18: ...sensor manufacturer and directives given under Requirements to sensor connection 5 Connect pressure sensor cable 5 to sensor s and then to valve connector SENSOR Refer to chapter Electrical connectio...

Страница 19: ...6 17 20 30 35 55 80 13 15 22 26 41 59 25 25 NA The torque values below are dependent on many factors such as materials involved surface quality surface treatment and lubrication The torques below are...

Страница 20: ...JIS ASA LP ISO F JIS ASA LP 63 4 N A N A N A N A N A N A 13 13 15 80 4 N A N A N A N A N A N A 13 13 15 100 4 N A N A N A N A N A N A 13 13 15 160 6 N A N A N A N A N A N A 14 14 15 200 8 N A N A N A...

Страница 21: ...the valve body as specified The following forces are admissible DN nom I D Axial traction or pressure force FA Bending moment M mm inch N lbf Nm lbf ft 63 2 1960 440 78 58 80 3 1960 440 78 58 100 4 24...

Страница 22: ...present Make also sure that there is no obstruction in front of sensor connection port inside the chamber The sensor should also be mounted free of mechanical shock and vibration Dynamic stray magnet...

Страница 23: ...omized Connection plates of ground strap must be total plane for a good electrical contact The connection point at chassis FE must be blank metal not coated It is also possible to connect the ground s...

Страница 24: ...Power and sensor connection 24 VDC sensors for schematic and correct wiring o External 24 VDC power to supply 24 VDC sensors External 24 VDC supplied to POWER connector is converted into 15 VDC by the...

Страница 25: ...tion a 5AF b Safety switch 3A min Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensor...

Страница 26: ...sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 0V at DB 15 female sensor connector exactly a...

Страница 27: ...fety switch 3A min Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 0V at DB 15 f...

Страница 28: ...h 3A min Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect Power supply 24 GND at power 5 pol male connector and Sensors 0V at DB 15 female sens...

Страница 29: ...stomer service informations and downloads control performance analyzer Alternatively the VAT Service Box2 can be connected to the service port for setup and local operation The service port is not gal...

Страница 30: ...te operation by means of digital and analog signals Digital inputs may be operated either by switches or by voltage sources a Configuration with switches for digital inputs Do not connect other pins t...

Страница 31: ...03ED Edition 2017 11 24 31 94 a Configuration with voltage source for digital inputs Do not connect other pins than indicated in the schematics above Use only screws with 4 40UNC thread for fastening...

Страница 32: ...16 HOLD Digital input 1 This function stops the valve at the current position After release of the signal the valve will return to the selected CONTROL MODE Only PRESSURE or POSITION Mode This functi...

Страница 33: ...letion this will not re initiate the function and does also not block functions with lower priorities 4 2 Without a LEARN data set the PID controller is not able to perform pressure control 18 LOCK Di...

Страница 34: ...ted A service request is indicated when the valve requires cleaning due to contamination Configuration of the functionality of this output can be done in local operation via service port By default th...

Страница 35: ...l scale high range POSITION CONTROL A voltage of 0 10V shall be applied to this input as position setpoint The position setpoint is in linear relation to the applied voltage 0V is closed but not isola...

Страница 36: ...r to chapter ZERO for details 6a LEARN Determination of the vacuum system characteristic to accommodate the PID controller Refer to chapter LEARN adaptive for details 6b PRESSURE CONTROL COFIGURATION...

Страница 37: ...tup Interface It s not possible to do Interface configuration via remote operation 4 6 3 Valve configuration Basic valve configuration must be adapted according to application needs Definition of valv...

Страница 38: ...the sensor input is equated to pressure zero In case of a 2 sensor system both sensor inputs will be adjusted A max offset voltage of 1 4V can be compensated The offset value can be read via local an...

Страница 39: ...tly By an OPEN VALVE CLOSE VALVE POSITION CONTROL or PRESSURE CONTROL command the routine will be interrupted Local operation Control View Control Performance Analyzer or Service Box 2 Remote operatio...

Страница 40: ...WP required conductance of working point l s qWP gasflow of working point sccm pWP pressure of working point Torr 2 Out of these calculated conductance values choose the lowest CR required lower condu...

Страница 41: ...Pressure controller Fixed pressure controller Refer to chapter Pressure controller Fixed pressure controller Refer to chapter Pressure controller Soft Pump Soft Pump Refer to chapter Pressure controll...

Страница 42: ...02Z00 get the actual pressure controller a i 02Z00a This command selects pressure controller a Pressure controller 0 Adaptive downstream 1 Fixed 1 2 Fixed 2 3 Soft pump It is not possible with remote...

Страница 43: ...ber c parameter value using data type unsigned integer or floating point dependend on the corresponding data type For details commands etc see next tables Remark Each pressure control algorithm has it...

Страница 44: ...nsor response time s The SENSOR DELAY is a control parameter to compensate delays during the pressure detection Pipes and orifices for sensor attachment can cause delays in response time and could imp...

Страница 45: ...r to adapt the performance of the pressure control algorithm A higher gain results in faster response higher over undershoot of pressure A lower gain results in slower response lower over undershoot o...

Страница 46: ...ant Time The RAMP TIME is dependent on the adjusted parameter ramp time and is always the same independent of the control deviation That means the ramp time from the actual value to the setpoint value...

Страница 47: ...ommand Request Data Type Values RAMP TIME Pressure setpoint ramp time s Set s 02C01c s 02 FLOAT c 0 00 1 000 000 0 Default is 0 00 Get i 02C01 i 02C01c RAMP MODE Set s 02C02c s 02 UINT c 0 or 1 0 cons...

Страница 48: ...e is the adjusted parameter ramp time value Mode 1 Constant Slope The RAMP TIME is dependent on the adjusted parameter ramp time and is different depending on the control deviation The RAMP TIME is ca...

Страница 49: ...each parameter grey boxes and its default values are described separately below Strictly keep the procedure order Required information for support Go to Tools Create Diagnostic File in Control View re...

Страница 50: ...th gain factor 1 0 2 Open valve 3 Control a typical pressure flow situation 4 Repeat from step 2 with lower higher gain factors until optimal pressure response is achieved and stability is ok Normally...

Страница 51: ...ached to the chamber according to Requirements to sensor connection This is the most effective measure against stability issues If your gauge attachment fulfills these criteria do not use this paramet...

Страница 52: ...end Adjustment procedure 1 Start with optimal gain factor and sensor delay time according to preceding tuning steps 2 Control a typical pressure flow situation 3 Control a lower pressure 4 Repeat from...

Страница 53: ...applications it may be of advantage to have a slower valve response OPEN and CLOSE are always done with maximum speed Adjustment procedure 1 Use optimal gain factor sensor delay time and setpoint ram...

Страница 54: ...It s not possible to do Valve speed adjustment via remote operation Introduction PI controller mode is used if for any reason e g too long system time constant the adaptive control mode does not provi...

Страница 55: ...pressure is stable Set pressure to SP1 If the transition from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all the P gain is too high If there is no over shoot...

Страница 56: ...in a slow asymptotical pressure rise and there is still a constant deviation to SP2 the I gain is too low The optimal value for I gain is found if the transition from SP2 to SP1 result in just a sligh...

Страница 57: ...process pressure 1 Optimizing P gain The P gain value evaluated for soft pump control mode might be different than the P gain value evaluated for PI controller mode When switching to pump down control...

Страница 58: ...ressure set point is 510 Torr At each new interval exceeding 10 sec send the new pressure set point Repeat until process pressure is achieved While pumping down chamber pressure and valve position sho...

Страница 59: ...e Diagnostic File in Control View resp Control Performance Analyzer and save file Pressure flow gas conditions to be controlled Chamber volume Pumping speed l s and pump type e g turbo pump System des...

Страница 60: ...ING Valve opening Risk of serious injury Human body parts must be kept out of the valve opening and away from moving parts Do not connect the controller to power before the valve is installed complete...

Страница 61: ...start software and push button LOCAL to enable for operation Then enter menu Sensor Setup and do sensor configuration according to your application to make sure that you get the correct pressure displ...

Страница 62: ...Control Performance Analyzer software or Service Box 2 may be used for monitoring during remote control Control Performance Analyzer software Service Box 2 In case Control Performance Analyzer softwa...

Страница 63: ...ONTROL MODE to POSITION CONTROL 2 Set position SETPOINT In case CLOSE VALVE OPEN VALVE or HOLD is also set these have higher priority 5 5 Pressure control To prepare valve for PRESSURE CONTROL perform...

Страница 64: ...sensor is phased in This maintains a functional response behavior in case of small calibration errors between the two sensors The pressure output in this range is a blend between both sensors For mon...

Страница 65: ...e g 1G 1 G 2 st information for about 3s Firmware version and firmware revision e g 00 05 0 0 0 5 3 nd information for about 3s Valve type e g 642 6 1 2 4 nd information for about 3s Controller config...

Страница 66: ...ol unit remains possible When motor interlock is active during power up the valve directly enters the safety mode and is not able to synchronize Display shows D C or D999 In this case synchronization...

Страница 67: ...wer up is closed Valve position after power up is open Refer also to chapter Display information 5 8 Behavior in case of power failure Valve position before power failure Reaction of valve Without Pow...

Страница 68: ...e procedure Valve plate mechanically obstructed Resolve obstruction Reset control unit Cycle power OFF ON or Send reset command local via service port with CV CPA Service Box2 Display shows E 40 fatal...

Страница 69: ...g Wait until sensor does not shift any more before performing ZERO System pumped to base pressure OPEN VALVE and bring chamber to base pressure before performing ZERO Sensor offset voltage exceeds 1 4...

Страница 70: ...e and system await until the valve is cooled down complete before doing any work NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room glov...

Страница 71: ...ve cleaning Required frequency of cleaning and replacement of seals is depending on process conditions VAT can give the following recommendations for preventive maintenance Replacement of Recommendati...

Страница 72: ...l Vacuum grease see chapter spare parts O ring removal tool see chapter Accessories Clean room wiper Description Required tool 1 Vent both valve chambers 2 Open the valve 3 Turn off power to valve con...

Страница 73: ...rank bolt can be reached 10 Loosen and remove the crank bolt screw Allen wrench 4 mm 11 Remove the crank bolt from lever 12 Pull out the gate assembly complete Caution Take care that gate is not scrat...

Страница 74: ...lly in o ring groove for new o ring refer to chapter Spare parts 17 Clean the valve body inside Cleaning tool a little soaked with isopropyl alcohol refer to chapter Spare parts for cleaning tool 18 C...

Страница 75: ...en torque wrench 4 mm 22 Push in the gate assembly into valve body 23 Clean the valve bonnet Clean room wiper a little soaked with isopropyl alcohol 24 Clean or replace the bonnet seal 25 Lubricate th...

Страница 76: ...quired tool 26 Reassemble the bonnet and bonnet seal with valve 27 Fasten the bonnet screws with DN 63 100 with 10 Nm DN 160 400 with 18 Nm DN 63 100 1 Open end torque wrench 13 mm 1 Open end wrench 1...

Страница 77: ...s under power The option board may or may not be equipped in your valve depending on the order Refer to page 1 of this manual to check valve version This board includes the optional modules for the va...

Страница 78: ...lower than 150 C the corresponding life time curve will be somewhere in between the upper and the lower curve Therefore please determine the equivalent maintenance period for replacing the Ultra Cap...

Страница 79: ...removed All boards have a fixed position into control and actuating unit It is not possible to fit a board in other position as shown in picture above 7 2 3 1 Required tools Open end wrench 4 5 mm Ope...

Страница 80: ...ons at controller Attention to ESD protection Pozidriv screw driver size1 Open end wrench 7 mm 2 Remove the panel screws Pozidriv screw driver size1 3 Remove this screws and the cover Screw driver siz...

Страница 81: ...panel screws with 1 1 Nm see step 3 9 Connect all electrical connections Pozidriv screw driver size1 Open end wrench 7 mm If you need any further information please contact one of our service centers...

Страница 82: ...pairs may only be carried out by the VAT service staff In exceptional cases the customer is allowed to carry out the repairs but only with the prior consent of VAT Please contact one of our service ce...

Страница 83: ...work 9 1 Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room gloves when handling the valve NOTICE Valve in open position Va...

Страница 84: ...humidity between 10 and 70 temperature between 10 C and 50 C non condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use t...

Страница 85: ...ng products to VAT please fill out the VAT form Declaration of Chemical Contamination of Vacuum Valves and Components and send it to VAT in advance The form can be downloaded from our website www vatv...

Страница 86: ...D 10 2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use the original packaging material and handle product with care VAT disclaim...

Страница 87: ...SAL 605403ED Edition 2017 11 24 87 94 11 Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the...

Страница 88: ...r for spare parts see chapter Identification of product This is to ensure that the appropriate spare parts are supplied VAT makes a difference between spare parts that may be replaced by the customer...

Страница 89: ...Series 642 SPARE PARTS 605403ED Edition 2017 11 24 89 94 12 1 Drawing...

Страница 90: ...62 407 N 6005 502 N 6162 407 N 6005 502 N 6162 407 8 Feedtrough connection pin N 6097 478 N 6097 478 N 6097 478 N 6097 480 N 6097 480 N 6097 509 N 6097 509 N 6097 509 14 Actuator standard with pumping...

Страница 91: ...ce Analyzer package for Windows free download from http www vatvalve com customer service informations and downloads control performance analyzer Service cable PC to valve Service connector 230327 htt...

Страница 92: ...48 Centering ring with Viton o ring for ISO F installation only Aluminum 32044 QAZV 32046 QAZV 32048 QAZV Stainless steel 32044 QEZV 32046 QEZV 32048 QEZV Valve size Product ordering number DN 320 12...

Страница 93: ...Series 642 APPENDIX 605403ED Edition 2017 11 24 93 94 13 Appendix No information entered on time...

Страница 94: ...Series 642 94 94 Edition 2017 11 24 605403ED This page left blank intentionally...

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