Varian TPS-compac, Инструкция по эксплуатации

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TECHNICAL INFORMATION
57/74 87-901-010-01
Scroll Pump Description
The TPS-compact internal scroll creates vacuum
using a simple dual scroll mechanism in which one
of the nested scrolls orbits about the other, creat-
ing moving zones of captured gas.
Gas enters the scroll set at the perimeter and is
displaced and compressed toward the center hub
where it is exhausted.
TECHNICAL SPECIFICATION
Characteristic TV301 TV81M
Pumping speed (l/s) N
2
: 215 l/s N
2
: 60 l/s
Base pressure* 1x10
-9
mbar (*) [CFF flanges]
7.5x10
-10
Torr (*) [CFF Flanges]
1x10
-8
mbar
[ISO Flanges]
7.5 x 10
-9
Torr
[ISO Flanges]
Inlet flange ISO 100, ISO 160,
CFF 6, CFF 8
KF 40, ISO 63,
CFF 2.75, CFF 4.5
Rotational speed 56000 RPM 80000 RPM
Start-up time 15 s
Operating position Any
Operating ambient
temperature
+ 5° C to + 35° C
Bakeout
temperature 120° C at inlet flange max. (CF flange)
80° C at inlet flange max. (ISO flange)
Noise level 55 dB (A) at 1 meter
Lubricant permanent lubrication
Power supply
(Line type):
Input
voltage:
Input frequency:
Max input power:
115 or 200–240 Vac
50 or 50 – 60 Hz
310 VA
115 or 200–240 Vac
50 or 50 – 60 Hz
260 VA
Protection fuse 115 Vac: 4 A
220 Vac: 2.5 A
115 Vac: 5 A
220 Vac: 3 A
Compliance with: UNI EN 292-1
UNI EN 292-2
EN 55011 (Class A Group 1)
EN 61000/3/2
EN 61000/3/3
EN 61000/4/2
EN 61000/4/3
EN 61000/4/4
EN 61010-1
EN 1012-2
Installation category II
Pollution degree 2
Power cable 115 Vac: USA plug 5 meters long
220 Vac: EU or UK plug 5 meters long
Serial communica-
tion (kit) RS232 cable with a 9-pin D type male
connector and a 9-pin D type female
connector, and software (optional)
Storage temperature - 20° C to + 70° C
Weight kg (lbs) 19.1 (42.1) 16.7 (36.8)
* According to standard DIN 28 428, the base pressure
is that measured in a leak-free test dome, 48 hours after
the completion of test dome bake-out, with a Turbopump
fitted with a ConFlat flange.
NOTE
When the TPS-compact has been stored at a tempera-
ture less than 5°C, wait until the TPS-compact has rea-
ched the above mentioned temperature.