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Varian TPS-compac, Инструкция по эксплуатации

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INSTRUCTIONS FOR USE 

 53/74 

87-901-010-01 

Safety Guideline 

 

for 

 

Turbomolecular Pumps 

 
 

Turbomolecular pumps as described in the following operating manual contain a large 
amount of kinetic energy due to the high rotational speed in combination with the specific 
mass of their rotors. 
 
In case of a malfunction of the system for example rotor/stator contact or even a rotor crash 
the rotational energy may be released. 
 
 

WARNING!

 

To avoid damage to equipment and to prevent injuries to operating 
personnel the installation instructions as given in this manual should be 
strictly followed! 

 

Содержание TPS-compac

Страница 1: ...ANUAL DE INSTRUCCIONES P MANUAL DE INSTRU ES NL BEDRIJFSHANDLEIDING DK INSTRUKSTIONSBOG S BRUKSANVISNING N INSTRUKSJON MANUAL FIN OHJEK SIKIRJA GR ODHGIES CRHSEWS H FELHASZN L I K ZIK NYV PL PODRECZNI...

Страница 2: ...TPS compact...

Страница 3: ......

Страница 4: ......

Страница 5: ...iption 56 Controller Description 56 Control Panel Description 56 Scroll Pump Description 57 TECHNICAL SPECIFICATION 57 TPS COMPACT OUTLINE 58 INLET SCREEN INSTALLATION 60 HIGH VACUUM FLANGE CONNECTION...

Страница 6: ...alla alta velocit di rotazione in unione alla massa specifica dei loro rotori Nel caso di un guasto del sistema ad esempio per un contatto tra rotore e statore o per una rottura del rotore l energia d...

Страница 7: ...umidit relativa da 0 a 95 non condensante il cliente deve sempre avviare le pompe turbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta il tempo di immagazzinament...

Страница 8: ...oft Start far riferimento al paragrafo Signal Description nel capitolo Technical Information Il LED blu STATUS posto sul pannello posteriore della base del TPS compact indica con la frequenza del suo...

Страница 9: ...ndung mit dem spezifischen Gewicht ihrer Rotoren ber eine gro e Menge kinetischer Energie Im Falle eines Systemdefekts z B durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch k n...

Страница 10: ...folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C Relative Feuchtigkeit von 0 bis 95 nicht kondensie rend Der Kunde hat die Turbomolekularpumpen nach dem Emp fang bei Erstinb...

Страница 11: ...higen Gasen verwendet werden Einschaltung und Gebrauch von Modell TPS compact Zur Einschaltung des TPS compact ist der Netzstecker anzu schlie en und der externe Schalter auf die Schaltstellung ON zu...

Страница 12: ...bracht Dieses Symbol nur in den EU L ndern g ltig zeigt an dass das betreffende Produkt nicht zusammen mit Haushaltsm ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden mus...

Страница 13: ...grande vitesse de rotation associ e la masse sp cifique de leurs rotors En cas de panne du syst me par exemple cause d un contact entre rotor et stator ou d une rupture du rotor l nergie de rotation p...

Страница 14: ...rature de 20 C 70 C humidit relative de 0 95 non condensante A la premi re utilisation les pompes turbomol culaires doivent toujours tre mises en marche en mode soft Start Le temps de stockage d une...

Страница 15: ...it Soft Start se r f rer au paragraphe SIGNAL DESCRIPTION dans le chapitre Technical Information La LED bleu STATUS plac e sur le panneau arri re de la base du TPS compact indique par sa fr quence de...

Страница 16: ...ebido a la alta velocidad de rotaci n en combinaci n a la masa espec fica de sus rotores En el caso de un da o del sistema por ejemplo por un contacto entre el rotor y el estator o por una rotura del...

Страница 17: ...condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcionamiento por primera vez el per odo m ximo de almacenamiento de una b...

Страница 18: ...ticamente la presencia de la alimentaci n y pone en marcha la bomba Al efectuar el primer encendido conviene adoptar la modalidad Soft Start activ ndola en el controller mientras que para las sucesiv...

Страница 19: ...obre el cual ha sido aplicado NO debe ser eliminado junto con los residuos comunes sean stos dom sticos o industriales y que por el contrario deber ser sometido a un procedimiento de recogida diferenc...

Страница 20: ...nergia cin tica devida alta velocidade de rota o unida massa espec fica de seus rotores Em caso de avaria do sistema causada por exemplo por um contacto entre o rotor e o estator ou uma ruptura do rot...

Страница 21: ...o condensante ao accionar as bombas turbomoleculares pela primeira vez o cliente deve activ las sempre em modalidade Soft Start o tempo m ximo de armazenagem de uma bomba turbomolecular de 10 meses a...

Страница 22: ...ncia o par grafo Signal Description no cap tulo Technical Information A luz piloto azul STATUS posicionada no painel traseiro da base do TPS compact indica atrav s da frequ ncia de intermit ncia as co...

Страница 23: ...e energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren In geval van een defect van het systeem bijvoorbeeld door een contact tussen de rotor en de stator of doordat de ro...

Страница 24: ...oet de turbomoleculaire pompen altijd met de Soft Start opstarten wanneer ze ontvangen worden en voor de eerste keer in werking worden gesteld de opslagtijd van een turbomoleculaire pomp bedraagt 10 m...

Страница 25: ...externe schakelaar in de stand ON te zetten De ingebouwde controller herkent automatisch de aanwezigheid van stroom en start de pomp Bij de eerste inschakeling wordt aangeraden om de Soft Start modal...

Страница 26: ...aan dat het product waarop het is aangebracht NIET mag worden afgevoerd samen met mormaal huisvuil of industrieel afval maar gescheiden moet worden ingezameld De eindgebruiker wordt dus verzocht conta...

Страница 27: ...h je omdrejningshastighed kombineret med deres rotorers specifikke v gt Hvis der er en fejl i systemet for eksempel p grund af en kontakt mellem rotor og stator eller fordi rotoren g r i stykker kan...

Страница 28: ...g opbevaring af pumperne temperatur fra 20 C til 70 C relativ fugtighed fra 0 til 95 ikke kondenserende Kunden skal altid starte de turbomolekyl re pumper ved hj lp af Soft Start funktionen ved modtag...

Страница 29: ...f lgende starter Hvad ang r fremgangsm den til tilkobling af Soft Start henvises der til afsnittet Signal Description i kapitlet Technical Information Den blu STATUS LED der er anbragt p bagpanelet p...

Страница 30: ...rotationshastigheten och rotorernas specifika massa I det fall fel skulle uppst i systemet t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas kan det h nda att rotationsener...

Страница 31: ...respekteras Temperaturomr de 20 C till 70 C Relativ fuktighet 0 till 95 utan kondens Kunden ska alltid mjukstarta de turbomolekyl ra pumparna n r de mottas och s tts i drift f r f rsta g ngen De turbo...

Страница 32: ...itlet Technical Information Den bl lysdioden STATUS p underdelens bakpanel p TPS compact anger genom frekvensen av dess blinkningar hur systemet fungerar fast sken pumpen roterar normalt l ngsamt blin...

Страница 33: ...nerginiv som skyldes den h ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor I tilfelle feil ved systemet for eksempel p grunn av en kontakt mellom rotor og stator eller b...

Страница 34: ...ur fra 20 C til 70 C Relativ fuktighet fra 0 til 95 uten kondensering Kunden m alltid soft starte de turbomolekyl re pumpene n r de mottas og startes opp f rste gang Lagringstiden for en turbomolekyl...

Страница 35: ...ittelet Technical Information under paragrafen Signal Description Det bl lysemitterende dioden STATUS som befinner seg p det bakre panelet til TPS compacts base angir ved hjelp av frekvensen p blinkin...

Страница 36: ...eutuu korkeasta py rimisnopeudesta yhdistettyn pumppujen roottorien massaan J rjestelm n vikatilassa esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa py rimisenergi...

Страница 37: ...en kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan pumpun ja k ytt ess n sit ensimm isen kerran Turbomolekyylisen pumpun varastoin...

Страница 38: ...n kohtaan Signal Description kappaleessa Technical Information TPS compact perustan takapaneeliin sijoitettu sininen STATUS led ilmoittaa vilkkumistiheydell n j rjestelm n toimintaolosuhteet palaa jat...

Страница 39: ...ODHGIES CRHSHS 34 74 87 901 010 01 KINDUNOS...

Страница 40: ...tontai se leitourg a gia pr th for o cr noj apoq keushj m aj strobilomoriak j antl aj e nai 10 m nej ap thn hmeromhn a apostol j PROSOCH E n gia opoiod pote l go o cr noj apoq keushj e nai megal tero...

Страница 41: ...simopoie te parous a ekrhktik n aer wn Enaush kai Cr sh tou TPS compact TPS compact ON O enswmatwm noj elegkt j anagnwr zei autom twj thn parous a thj trofod thshj kai q tei se k nhsh thn antl a Soft...

Страница 42: ...val rendelkeznek a nagy forg si sebess g k s a rotorok fajlagos t mege miatt A rendszer hib s m k d se p ld ul a rotor ll r sz rintkez si hib ja vagy ak r a forg r sz sz tt r se eset n a forg si energ...

Страница 43: ...v p ratartalom 0 95 nem kondenz l A turbomolekul ris szivatty kat mindig l gyan kell ind tani amikor a felhaszn l tveszi s el sz r zemelteti Egy turbonukle ris szivatty rakt rozhat si ideje 10 h nap...

Страница 44: ...lle r s bekezd s a Technical Information fejezetben A k k STATUS kijelz a villog s s r s g vel jelzi a rendszer m k d si llapot t nem villog sn l a szivatty rendesen forog lassan villog kb 400 ms peri...

Страница 45: ...n bardzo wysok pr dko ci obrot w razem z mas w a ciw wirnik w W przypadku uszkodzenia systemu na przyk ad z powodu kontaktu mi dzy wirnikiem a stojanem lub z powodu p kni cia wirnika energia obrotowa...

Страница 46: ...zesuni cia i magazynowania pomp nie mog by przekroczone nast puj ce warunki rodowiskowe temperatura od 20 C do 70 C wzgl dna wilgo od 0 do 95 bez opar klient po otrzymaniu i przygotowaniu po raz pierw...

Страница 47: ...czy TPS compact wystarczy dostarczy napi cie zasilania i ustawi wy cznik zewn trzny w pozycji On Wbudowany sterownik tzw kontroler automatycznie rozpozna obecno zasilania i uruchomi pomp Przy pierwsz...

Страница 48: ...i Europejskiej oznacza ze wyrob ktory nim zostal oznaczony NIE moze byc przetworzony jako odpad razem z innymi domowymi lub przemyslowymi natomiast musi byc skladowany w miejscu przeznaczonym dla odpa...

Страница 49: ...odu obsahuj velk mno stv kinetick energie d ky vysok ot iv rychlosti v kombinaci s konkr tn m objemem jejich rotor V p pad syst mov nefuk nosti nap kontaktu rotoru anebo statoru nebo p i zhroucen roto...

Страница 50: ...s u ivatel po dod vce a poprv v dycky spou t t pozvoln skladovatelnost turbomolekul rn v v vy je 10 m s c ode dne doru en VAROV N Pokud dojde z jak hokoli d vodu k p ekro en skladovac lh ty erpac syst...

Страница 51: ...m panelu z kladny modelu TPS compact ukazuje prost ednictv m rychlosti sv ho blik n opera n stav syst mu bez blik n v v va se ot norm ln pomal blik n interval cca 400 ms syst m se pozvolna rozb h nebo...

Страница 52: ...ve k mno stvo kinetickej energie v aka vysokej ot avej r chlosti v kombin cii s konkretn m objemom ich rotorov V pr pade syst movej poruchy napr pri kontaktu rotora statora alebo pri zr caniu rotora s...

Страница 53: ...hkosti 0 a 95 bez kondenz cie z kazn k mus pri prvom spusten turbomolekul rnej v vevy v dy postupova pomaly a postupne skladovate nos turbomolekul rnej v vevy je 10 mesiacov odo d a dodania UPOZORNENI...

Страница 54: ...n jdete v odstavci Popis sign lu v kapitole Technical Information Modr LED STATUS umiestnen na zadnom paneli zariadenia TPS compact signalizuje frekvenciou blikania operat vne podmienky v ktor ch sa n...

Страница 55: ...no kineti ne energije zaradi visoke hitrosti v povezavi s specifi nimi masami rotorjev V primeru nepravilnega delovanje sistema na primer pri dotiku rotorja statorja ali po kodbe rotorja se lahko spro...

Страница 56: ...95 brez kondenza Turbomolekularne rpalke morate pred prvo uporabo zmerja zagnati mehko ivljenjska doba turbomolekularne rpalke je 10 mesecev od datum po iljanja POZOR e zaradi kakr nega koli razloga...

Страница 57: ...oft Start glej odstavek Opis signalov v poglavju Technical Information Plava lu ka STATUS ki se nahaja na zadnji plo i TPS compact ka e preko frekvence lastnega utripa operativne pogoje sistema Brez u...

Страница 58: ...rgy due to the high rotational speed in combination with the specific mass of their rotors In case of a malfunction of the system for example rotor stator contact or even a rotor crash the rotational...

Страница 59: ...he turbomolecular pumps must be always soft started when received and operated for the first time by the customer the shelf life of a turbomolecular pump is 10 months from the shipping date CAUTION If...

Страница 60: ...flashing frequency the system operating conditions with no flashing the pump is normally rotating slowly flashing period of about 400 ms the system is in ramp or in braking or in Stop or in Waiting fo...

Страница 61: ...ic blades of the stator are fabricated in stainless steel These are supported and accu rately positioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with p...

Страница 62: ...A at 1 meter Lubricant permanent lubrication Power supply Line type Input voltage Input frequency Max input power 115 or 200 240 Vac 50 or 50 60 Hz 310 VA 115 or 200 240 Vac 50 or 50 60 Hz 260 VA Pro...

Страница 63: ...owing figure shows the TPS compact outline Dimensions are in mm PRESSURE x10 Pa mBar Torr Pa mBar Torr PRESSURE x10 TPS compact equipped with TV301 0 50 100 150 200 250 0 0001 0 001 0 01 0 1 Inlet Pre...

Страница 64: ...ssure mbar Pumping speed l s Graph of pumping speed vs inlet pressure TPS compact TV301 TV81M 14lt Pump Down 1 E 06 1 E 05 1 E 04 1 E 03 1 E 02 1 E 01 1 E 00 1 E 01 1 E 02 1 E 03 0 60 120 180 240 300...

Страница 65: ...let screen is fitted in the upper part of the pump as shown in the figure The screen can be mounted on each pump The screen can be removed as shown in the fol lowing figure The following figure shows...

Страница 66: ...ections we recommend using Varian hardware To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to the screw threads protruding from the flange and between the nuts an...

Страница 67: ...owing figure show the input power connec tor Bipolar switch IEC320 connector Fuses Line GND Line P3 Vent Vent Connector This is a dedicated 24 Vdc connector to control the optional vent valve availabl...

Страница 68: ...Inverted Magnetron plus Pi rani Gauge FRG 700 measure from 5x10 9 mbar to atmos phere 3 8x10 9 Torr to atmosphere and its tem perature range goes from 5 C to 55 C 41 131 F Pressure data is available...

Страница 69: ...SIGNAL OUT 15 GROUND PROGRAMMABLE ANALOG SIGNAL OUT Signal description START STOP input signal to start or stop the pump Without the supplied cover connector the turbomolecular pump automatically star...

Страница 70: ...g 0 10 20 30 40 50 60 70 80 90 100 0 1 2 3 4 5 6 7 8 9 10 Voltage V Temperature C Output Pressure setting 1 0E 09 1 0E 08 1 0E 07 1 0E 06 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 0 1 2 3 4 5 6 7 8 9 10...

Страница 71: ...optional allows the op erator to set all the programmable feature How to connect the open collector input of the controller Here below there are the typical connections of the open collector input of...

Страница 72: ...D 6 A RS485 7 Not used 8 B RS485 9 Not used A serial communication kit with a serial cable and the Navigation Software is available optional RS 232 RS 485 COMMUNICATION DESCRIPTION Both the RS 232 and...

Страница 73: ...R CRC to the host The MESSAGE is a string with the following format STX ADDR WIN COM DATA ETX CRC where NOTE When a data is indicated between two quotes it means that the indicated data is the corresp...

Страница 74: ...ion Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Controller Destination PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Controller 02 80 3...

Страница 75: ...400 2 4800 3 9600 4 default 4 109 W L Pump life cycle time cycle number reset To reset write 1 110 R W L Interlock type default 1 Impulse 0 Continuous 1 N Read Write Data Type Description Admitted Val...

Страница 76: ...at when the controller stops the vent valve is opened with a delay defined by window n 126 when the controller starts the vent valve is immediately closed 2 On command means that the vent valve is ope...

Страница 77: ...If seal debris is attached to the sides use a razor or Exacto knife to scrape the debris off To install the new seals and O rings 1 Unpack the Tip Seals Two tip seals are provided in the kit one fits...

Страница 78: ...N Vacuum system leak Locate and repair leak Excessive voltage drop Check size and length of cable System will not start Fuses burnt out Check fuses and if necessary replace Vacuum system leak Locate a...

Страница 79: ...7 969 9397 969 9397 969 9397 969 9397 969 9397 969 9397 969 9397 EU Power cord 2 m 969 9396 969 9396 969 9396 969 9396 969 9396 969 9396 969 9396 969 9396 UK Power cord 2 m 969 9398 969 9398 969 9398...

Страница 80: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Страница 81: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Страница 82: ...1263 Toll Free 0120 655 040 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico...

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