![Varian 969-8217 Скачать руководство пользователя страница 76](http://html.mh-extra.com/html/varian/969-8217/969-8217_instruction-manual_854731076.webp)
TECHNICAL INFORMATION
71/74
87-901-010-01
N. Read/
Write
Data
Type
Description Admitted
Values
167 R/W A Stop
speed
reading
Activates /
deactivates
the pump
speed read-
ing after Stop
command
0 = disable
1 = enable
(default = 0)
200 R
N Pump
current
in mA dc
201 R
N Pump
volt-
age in Vdc
216 R N Controller
Air
Temperature
(°C).
0 to 70
224 R A Pressure
reading
Format = X.X
E XX
226 R N Rotation
Fre-
quency (rpm)
300
R
N
Cycle time in
minutes (ze-
roed by the
reset com-
mand)
0 to 999999
301 R N Cycle
num-
ber (zeroed
by the reset
command)
0 to 9999
302
R
N
Pump life in
hours (ze-
roed by the
reset com-
mand)
0 to 999999
310
to
347
Reserved to Varian service
358 R/W N Tip-seal
life
(R)
Tip-seal life
reset (W)
0 = reset
400 R A CRC
EPROM
(QE)
QE8XXXX
(where “XXXX”
are variable)
401 R A Boot
CRC
(BL)
BL2XXXX
(where “XXXX”
are variable)
402 R A CRC
Param.
(PA)
PA8XXXX
(where “XXXX”
are variable)
404 R A CRC
Pa-
rameter
structure
"XXXX"
406 R A Program
List-
ing Code
"XXXXXXXXXX"
407 R A Parameter
Listing Code
"XXXXXXXXXX"
500
Reserved to Varian service
N. Read/
Write
Data
Type
Description Admitted
Values
503
R/W
N
RS 485 ad-
dress
0 to 31
(default = 0)
504 R/W L Serial
type
select
0 = RS 232
1 = RS 485
(default = 0)
NOTES
1. Automatic means that when the controller
stops, the vent valve is opened with a delay
defined by window n. 126; when the controller
starts, the vent valve is immediately closed.
2. On command means that the vent valve is
opened or closed by means of window n. 122.
3. These commands remove the pump motor
supply for a short time. If they are used con-
tinuously, they can cause the pump stopping.
7 6 5 4 3 2 1 0
TOO
HIGH
LOAD
NO
CONNECTION
SHORT
CIRCUIT
PUMP
OVERTEMP.
OVERVOLTAGE
CONTROLL.
OVERTEMP.
Window N. 206 Bit Description
SERVICE OPTIONS
Varian pumping systems will provide many years
of trouble-free operation if the maintenance proce-
dures are observed.
Pumping System cleaning and internal scroll pump
tip seal replacement are recommended when
Pumping System TMP adsorbed current (with
blanked inlet flange) has risen to an unacceptably
high level (>500mA) or when the message “TIP-
SEAL SERV” appears on the TPS-compact front
side display.
The warning message appears after 5000h of op-
eration.
If your TPS-compact exhibits humming or grinding
noises from the scroll pump, a major overhaul
should be done by Varian Vacuum Technologies.
Advance exchange TPS-compact are available to
minimize downtime.
The parts needed for Tip-Seal replacement on the
internal scroll pump are available in the kit de-
scribed in Orderable parts Table. This kit contains
seals and O-rings, and can be obtained from your
Varian dealer.