Varian 969-8217, Инструкция по эксплуатации

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TECHNICAL INFORMATION
64/74 87-901-010-01
EyeSys Mini-IMG gauge dimension
FRG-700 gauge dimension
J5 – IN-OUT
This connector carries all the input and output sig-
nals to remote control the TPS-compact.
It is a 15-pins D type connector; the available sig-
nals are detailed in the table, the following para-
graphs describe the signal characteristics and use.
PIN N. SIGNAL NAME
INPUT/
OUTPUT
1 START/STOP (+) IN
2 START/STOP (-) IN
3 INTERLOCK (+) IN
4 INTERLOCK (-) IN
5 SPEED SETTING (+) IN
6 SPEED SETTING (-) IN
7 SOFT START (+) IN
8 SOFT START (-) IN
9 +24 Vdc I
max
= 30 mA OUT
10 NORMAL OUTPUT (relay)
V
max
= 125V I
max
= 200 mA
OUT
11 PROGRAMMABLE SET POINT OUT
12 NORMAL OUTPUT OUT
13 FAULT OUTPUT OUT
14 PROGRAMMABLE ANALOG
SIGNAL (+)
OUT
15
•
GROUND
•
PROGRAMMABLE ANALOG
SIGNAL (-)
OUT
Signal description
START/STOP : input signal to start or stop the
pump. Without the supplied cover connector the
turbomolecular pump automatically starts, if you
want to stop the turbo-pump from outside, you
have to connect the START/STOP (+) signal to the
+24 Vdc pin and the START/STOP (-) signal to the
GROUND pin (this is the default configuration of
the cover connector).
INTERLOCK : input signal to control the pump ro-
tation. With the supplied cover connector the IN-
TERLOCK (+) signal is connected to the +24 Vdc
pin and the INTERLOCK (-) signal to the
GROUND pin; in this condition the pump is
stopped.
SOFT START : this input is used to provide a "soft
start" to the pump; in this condition the ramp-up
time could be up to 20 min.
SPEED SETTING : PWM input signal to set the
pump speed. The PWM signal characteristics must
be the following:
•
frequency: 100 Hz +/-20%