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INSTRUCTIONS FOR USE
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CN929-7015M002
GENERAL INFORMATION
This equipment is intended for professional use. Prior to
using this equipment the user must carefully read this
Instruction Manual in its entirety and any additional
information provided by Varian. Varian declines all
responsibility for damage caused by the total or partial
misuse of the instructions provided herein, by the
improper use of the equipment by untrained personnel,
by unauthorized interventions or by negligence in
complying with any specific national rule or regulation.
The following sections provide you with all the
information needed to guarantee the operator’s safety
when using the equipment. Detailed information is
provided in the appendix entitled “Technical
Information”.
The following conventions are used in this manual:
!
Danger messages call the operator’s attention to a
specific procedure or operation that could cause serious
injury if not performed correctly.
WARNING
Warning messages are provided before procedures that
could cause damage to the equipment if not complied
with.
NOTE
Notes provide you with important information extracted
from the text.
CONTROLLER DESCRIPTION
Varian’s E-Net Dual Controller is a flexible ion pump
controller, which is pre-configured at the factory
according to the customer’s requirements.
The E-Net Dual Controller is available with:
•
Front panel with keypad, display (16x2) and
microprocessor card.
•
Remote I/O card.
•
Serial data exchange card (optional).
•
Power supply card with integrated DSP for output
voltage management.
•
High
voltage
card(s).
The E-Net Dual Controller is available with positive or
negative polarity, with 1 or 2 channels, on request.
The E-Net Dual Controller can control up to two ion
pumps, from 20 l/s to 500 l/s with positive or negative
polarity.
Reliable pressure are measured at up to 10
-11
Torr.
Variable voltages allow the pump performance to be
optimized on the entire operational field.
The E-Net Dual Controller can be controlled in the
LOCAL mode, REMOTE I/O mode and in the SERIAL
mode via the RS 232-422 and 485 ports (the RS422
and RS485 are optional) or via E-Net port.
The E-Net port and the serial port can be used not
together.
The ways in which the operating commands are
entered into the system differ depending on the
controller’s mode of operation:
•
In the LOCAL mode all the commands are entered
through the front panel
•
In the REMOTE I/O mode all the commands are
entered through remote I/O signals (Relay
contacts) which are connected to the Remote
Control connector on the rear panel
•
In the SERIAL mode all the commands are through
a local computer.
DANGER!