Varian 919-1115 Скачать руководство пользователя страница 24

TECHNICAL INFORMATION 

Leakage current check 

If the pump current reading is to be used as pres-
sure measurement, check the pump leakage cur-
rents as follows: 

1.  Turn off the pump control unit. 

2.  Remove the pump magnet. 

3.  Turn on the pump control unit and wait for cur-

rent stabilization. The current reading should 
not be higher than 10 nA at 3 kV. Make sure 
that the control unit and the high voltage cable 
leakage current is negligible. 

4.  If leakage current comes from the pump, per-

form "high-potting" per the following procedure; 
then recheck the pump and install the magnet. 

5.  If it is not possible to "high-pot" the pump, the 

pressure reading is biased by the leakage cur-
rent value. 

High-potting 

A constant pump current when no vacuum leak 
exists is often caused by field emission currents 
which prevent the use of the pump current as a 
UHV pressure indicator. To reduce this field emis-
sion current, "high potting" should be performed. 
"High potting" is the term used to describe the ap-
plication of higher than normal operating voltage 
(10-12 KV, 20-50 mA) for the purpose of burning 
off "whiskers" (sharp edges) on the pump cathode. 

High potting should be done under vacuum and 
preferably without pump magnets installed (to re-
duce the drawn current). 

The output of an appropriately sized AC trans-
former (i.e. neon sign type) may be applied to the 
pump. High-potting should be done carefully and 
in voltage steps since uncontrolled arcing inside 
the pump can cause permanent damage. Slowly 
increase the applied voltage and watch the current 
meter for indication of arcing inside the pump as 
whiskers are burned away. If arcing occurs wait at 
this voltage until the current is stable again. Then 
slowly increase voltage again in steps up to a 
maximum of 12 kV. The current should never ex-
ceed 50 mA. 

,

WARNING!

 

Voltages developed in the High Potter power sup-
ply are potentially lethal. Use caution during opera-
tion and ensure correct grounding connection. 

 

 19 

87-900-106-01(B) 

Содержание 919-1115

Страница 1: ...del 919 1115 Model 919 1125 Model 919 1145 Model 919 1146 Model 919 1114 Model 919 1124 Model 919 1144 I MANUALE DI ISTRUZIONI D BEDIENUNGSHANDBUCH F NOTICE DE MODE D EMPLOI GB INSTRUCTION MANUAL 87 9...

Страница 2: ...VacIon Plus 20...

Страница 3: ......

Страница 4: ......

Страница 5: ...Vacuum evaluation 14 Short circuits 14 TYPICAL INSTALLATION 14 INLET FLANGE CONNECTION 15 CONTROL UNIT CONNECTION 16 SAFETY INTERLOCK 16 HEATER INSTALLATION 16 HEATER REPLACEMENT 17 BAKEOUT OPERATION...

Страница 6: ...engono informazioni importanti estrapolate dal te sto PREPARAZIONE PER L INSTALLAZIONE La pompa viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi v...

Страница 7: ...zione all aria il deposito del composto di titanio assorbe vapore acqueo in con seguenza di ci al successivo avvio il riscaldamento della pom pa provoca il rilascio del vapore e di parte dell idrogeno...

Страница 8: ...hr besteht ACHTUNG Die Warnhinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam da bei Nichteinhaltung Sch den am Ger t entstehen k nnen W hrend des Betriebes soll die Umgebungstem...

Страница 9: ...stromwert der Steuereinheit ann hert weist auf eine Leckstelle an der Pumpe und am System hin Ein zeitweiliger Anstieg des Vorvakuumdruckes ist w hrend der Anlaufphase nor mal 4 W hrend des Anlaufes d...

Страница 10: ...fonctionne ment pour respecter les sp cifications techniques d clar es la temp rature ambiante doit tre comprise entre 0 C et 85 C ATTENTION Les messages d attention apparaissent avant certaines proc...

Страница 11: ...400 V Une valeur de courant proche du courant de court circuit de l unit de contr le r v le l existence d une fuite dans la pompe et dans le syst me Au cours de la phase de d marrage un accroissement...

Страница 12: ...in explosive environments or those with a high fire risk Dur ing operation to obtain the specified operation the ambient temperature must be between 0 C and 85 C CAUTION The caution messages are displ...

Страница 13: ...umped hydrogen thus the starting time may be lengthened CAUTION Do not put any electronic device near the pump otherwise the magnetic field around it may cause a device malfunctioning MAINTENANCE Oper...

Страница 14: ...ty high voltage supply is required to operate Diode and Noble Diode pumps A nega tive polarity high voltage supply is required to op erate StarCell pump since the anode is grounded and the cathode is...

Страница 15: ...ate the VacIon Plus 20 pump it normally requires an amount of gas equal to 0 6 Torr litres mbar litres Consequently pumps can operate for extended periods of time at low pressures in the non saturated...

Страница 16: ...TECHNICAL INFORMATION VACION PLUS 20 NOBLE DIODE Fig 6 Pumping speed vs pressure for Nitrogen Fig 7 Pumping speed vs pressure for Argon Fig 8 Pressure vs current diagram 11 87 900 106 01 B...

Страница 17: ...0 DIODE Fig 9 Pumping speed vs pressure for Nitrogen Fig 10 Pressure vs current diagram OUTLINE DRAWING The following figure shows the outline drawing for the VacIon Plus pump Fig 11 VacIon Plus pump...

Страница 18: ...ne of the pump and in the plane of the flange as a function of distance from the pump are shown in Figs 13 14 and 15 Fig 12 VacIon Plus pump axis identification Fig 13 Stray magnetic field along X axi...

Страница 19: ...or an indication of one of the following conditions If the pump is free of leaks and is at a low pressure the pressure indication shall within 10 minutes fall to or below the 10 8 Torr mbar range as t...

Страница 20: ...nal vacuum using pliers to open the copper tube pinch off CAUTION Do not open the pinch off seal with a saw or grinder These methods will cause metal particles to be drawn into the pump by the inrushi...

Страница 21: ...or blanked off WARNING Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at least 10 seconds after removing the...

Страница 22: ...the pump and system cool down to room temperature a drop in pressure should be ob served Note that the ion pump can be also baked when switched off into an external turbo pump through a bakeable isola...

Страница 23: ...it be sure the main power is removed from the control unit Before removing the high voltage connector of the cable from the control unit be sure the main power is removed from the control unit Wait at...

Страница 24: ...emis sion current high potting should be performed High potting is the term used to describe the ap plication of higher than normal operating voltage 10 12 KV 20 50 mA for the purpose of burning off...

Страница 25: ...and pump Subse quent reduction in pressure de pends on the rate of depletion of this vapour Heavy hydrocarbons are most troublesome because of their relative low vapour pressure and they are very diff...

Страница 26: ...Ferrite magnets 919 0040 919 0039 919 0035 Samarium Cobalt magnets 919 0036 Heaters 120V 220V 919 0044 919 0043 Copper gasket for 2 3 4 inlet flange 10 pack individually sealed FG 0275 CI Nut and bolt...

Страница 27: ...0 Vac 2 Neg 120 Vac 1 Pos 120 Vac 2 Pos 230 Vac 1 Neg 230 Vac 2 Neg 230 Vac 1 Pos 230 Vac 2 Pos 929 7008 929 7009 929 7010 929 7011 929 7012 929 7013 929 7014 929 7015 MidiVac 120 Vac with single outp...

Страница 28: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Страница 29: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Страница 30: ...1263 Toll Free 0120 655 040 Korea Varian Technologies Korea Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico...

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