9
System Test/Chamber Seal Test
To perform a system test/chamber seal test:
1.
Select
Program Mode
, then select
Program 125 Chamber Seal Leak Test.
2.
Select
Test Setup.
3.
Select the
Regulator tab
(see Figure 8), then adjust external pressure regulator (see
Figure 9) until QMR displays ~-827mbar. Once pressure is achieved, select
deactivate.
(Note the system could be tested at any pressure.)
4.
Return to
Run Mode
, then select
Start
to run the Chamber Seal Test program. The
test will continue through the vent phase. The result of this test should be less than
0.3 mbar. The QMR will give a pass (green diamond) if within tolerance. If not
within tolerance, the QMR will display a fail/abort (red diamond). If the test fails,
check vacuum connections.
5.
Once the chamber and part seal are determined to be leak tight, proceed to the
intended production test.
Figure 9: QMR Controls/External Pressure Regulator
External Pressure
Regulator
Figure 8:Regulator Screen
