Ulvac SPU, Инструкция по эксплуатации

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II
Safety Precautions
In order to safely use the G-TRAN Series sensor unit (below, "this unit"), please read the instruction
manual and the safety precautions below.
Request repairs for this unit from the dealer where purchased, from ULVAC Inc., or
from the URL listed in this instruction manual.
Repair
If this unit is accidentally damaged, immediately turn off the power supply. There is
a risk of fire and electric shock from use in this state.
Power off
If this unit produces unusual heat, smoke, or a strange smell, immediately turn off the
power supply. There is a risk of fire from use in this state.
Power off
Before turning on the power supply, check that the operating voltage to the SH2
multi-ionization gauge and the supply voltage are the same. If the wrong power supply
is mistakenly connected, there is a risk of damage to the devices connected to the SH2
multi-ionization gauge and a risk of fire. The overvoltage category is category I.
Power supply voltage
Do not connect this unit in a location where the gauge head's internal pressure
exceeds atmospheric pressure. If the gauge head's internal pressure exceeds
atmospheric pressure, there is a risk of damage to the gauge head and it may pose a
hazard to its surroundings, including to people, by flying off its connector. When
exceeding atmospheric pressure, install an isolation valve to ensure that the gauge
head's internal pressure does not exceed atmospheric pressure.
Excessive vacuum chamber pressure
Always connect this unit electrically to a grounded vacuum chamber. Use a
conductive metal clamp on the NW flange. If this unit is not correctly connected, it will
not only show the wrong pressure, there is a risk of damage to this unit and the
equipment connected to this unit and a risk of fire.
Protective grounding
When isolated with the vacuum chamber, ground the NW flange metal clamp with a
class D (class 3) ground.
The pressure value and accuracy for this unit differ by the type of gas measured. The
accuracy for this unit is based on measuring nitrogen gas. Be careful of
overpressurization when using gases other than nitrogen.
Gas type dependency
Do not disassemble this unit. There is a risk of fire and electric shock. If
disassembled, sensor operation cannot be guaranteed.
Disassembly prohibited
Do not modify this unit. There is a risk of fire and electric shock. If modified, sensor
operation cannot be guaranteed.
Modification prohibited
Before turning on the power supply, check that this unit operating voltage and the
supply voltage polarity are the same. If the wrong power supply is connected, there is a
risk of damage to this unit and to devices connected to this unit and a risk of fire.
Check power supply voltage
Always connect this unit to a power supply and evaluation unit that conforms to
standards (EN61010 SELV-E) for safety extra low voltage protected by grounding.
Install a fuse in the connection.
Operating power supply
After connecting this unit and the SH2 with the unit cable, turn on the power supply to
the SH2. If the power is supplied before connecting them, there is a risk of damage to
this unit and the SH2 and a risk of fire. There is also a risk of breaking the filament in
the gauge head.
Power on