Ulvac SPU, Инструкция по эксплуатации

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8
4.3.2.
Attaching this unit
・
Attach this unit so that the gauge head attachment opening surface is parallel to the gas flow. In
particular, ensure that gases do not enter the gauge head interior like a beam.
・
As much as possible, attach the gauge head so the filament is vertical to the force of gravity. (See
Figure 4-2)
・
The Pirani vacuum gauge head filament is thin at
φ25 µm, so avoid use in a location with a large
amount of vibration as much as possible. The biggest cause of filament breaks is from mechanical
shock, so use caution regarding the installation location and handling.
・
Use an O-ring to attach the gauge head that releases little gas. There is a risk of measurement
errors or the gauge head lifespan will decrease if materials that release a large quantity of gas, such
as rubber tubes or grease, are used in the gauge head connection.
Vertical direction
Gas flow direction
Figure 4-2 Attaching the SPU