Ulvac MBS-C, Инструкция по эксплуатации

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CRYO METER MBS-C Instruction Manual
Revision History
Date Revision No. Contents
2005-12-27
2006-02-02
2006-08-23
2007-09-04
2009-06-08
2009-09-24
2013-11-08
2014-10-06
2017-12-20
2005.12
2006FY01
2006AT02
2007SR03
2009JE04
2009SR05
2013NR06
2014OR07
2017DR08
First edition
P.4, Correction of the model number of Angle 90
°
Clamp in
Table 3-2.
IO Connector has changed.
Supplement 1, 2 and 3 have been added.(P.13-P.18)
Addition of disposal consideration. (P.IW-1)
“Introduction” has revised.
UCN address has changed.
“SERVICE NETWORK” has revised.
WARNING has added Section 4.2 Cable Connection.
“Introduction” has revised.
“SERVICE NETWORK” has revised.
Figure 1-2 has been changed (MBD-S, MBD-T Added)
Table 1-1 MBS-C2a and C3a have been added.
2. General Specifications Table 2-1 has been modified.
3. Connector Specifications Figure 3-1 has been changed.
4.1 Thermocouple Installation
The process to attach thermal anchor has been added.
4.2 Cable Connection
Cautions have been modified.
Figure 4-5 has been added.
Table 6-1 Items V and VI have been added.
4.2 Cable Connection Figure4-5 has been modified.
SERVICE NETWORK has been revised.
ULVAC CRYOGENICS INCORPORATED R-1