Ulvac MBS-C, Инструкция по эксплуатации

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CRYO METER MBS-C Instruction Manual
5. Status Display
Power ON MBD or MBS-C
Supply dc-power for MBS-C or power on MBD to supply the power for MBS-C.
If there is a defect or danger, shutoff the branch circuit power immediately. After that, check the
cable connections referring to Section 6. Troubleshooting.
Check that the indicator lights up after power-on. MBS-C displays three different colors (red,
orange and green) according to the temperature inside cryopump. The line indicator lights up for
MBD.
Listed below are the descriptions for status displays in several conditions.
Status Display and Output Signal for MBS-C
Figure 5-1 Front Panel of CRYO METER MBS-C
Table 5-1 Status Display of MBS-C
Color Status
K(CA)
(Appended
Figure 2)
I/O ANALOG
OUTPUT
(Appended Figure
1)
I/O Contact Output
(Pin-Pin)
Red
Lights up when temperature of
2nd stage is 280K and above.
Temperature inside cryopump is
at room temperature(20
℃
) and
above.
Approx. 0mV
or more
1.2V or less
(4-12)
Open
(5-13)
Close
Orange
Lights up when temperature of
2nd stage is between 20K and
280K. Cryopump is in cool-down
or regeneration operation.
Refer to
Appended
Figure 2.
Refer to
Appended
Figure 1.
(4-12)
Open
(5-13)
Open
Green
Lights up when temperature of
2nd stage is below 20K.
Cryopump is in steady operation. Nominal
-6.5mV or less
4.8V and above
(4-12)
Close
(5-13)
Open
NOTE:
When the indicator does not light as shown in Table 5-1, there is a possibility of an error or defect.
Please refer to Section 6. Troubleshooting for details.
10 ULVAC CRYOGENICS INCORPORATED