Ulvac MBS-C, Инструкция по эксплуатации

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CRYO METER MBS-C Instruction Manual
1. General
1.1 Features
CRYO METER MBS-C is the successor to MBS.
MBS-C is installed on CRYO-U
® cryopump manufactured by ULVAC CRYOGENICS, INC.
and measures temperature inside cryopump from 10K to 350K.
ump manufactured by ULVAC CRYOGENICS, INC.
and measures temperature inside cryopump from 10K to 350K.
The MBS-C measures temperature of 2nd stage of cryopump utilizing cryogenic
thermocouple (Chromel-AuFe thermocouple), and outputs handling no-voltage dry contacts
and analog signals.
The MBS-C measures temperature of 2nd stage of cryopump utilizing cryogenic
thermocouple (Chromel-AuFe thermocouple), and outputs handling no-voltage dry contacts
and analog signals.
With two dry contacts, MBS-C displays three different temperature levels of 2nd stage such
as below 20K, 20K to 280K, and 280K and above. The temperature is displayed on front
panel of MBS-C with LED indicator which has three different colors.
With two dry contacts, MBS-C displays three different temperature levels of 2nd stage such
as below 20K, 20K to 280K, and 280K and above. The temperature is displayed on front
panel of MBS-C with LED indicator which has three different colors.
The analog output signal indicates 2nd stage temperature with 5 – 0 Vdc corresponding to
10K – 350K range. Also, the analog line is isolated from the power line.
The analog output signal indicates 2nd stage temperature with 5 – 0 Vdc corresponding to
10K – 350K range. Also, the analog line is isolated from the power line.
Moreover, MBS-C has K(CA) thermocouple for 1st stage of cryopump or for detecting baffle
temperature, it therefore outputs the thermocouple electromotive force directly.
Moreover, MBS-C has K(CA) thermocouple for 1st stage of cryopump or for detecting baffle
temperature, it therefore outputs the thermocouple electromotive force directly.
The input power for MBS-C is DC24V. When operating MBS-C with CRYO METER MBD,
manufactured by ULVAC CRYOGENICS, the input power can be supplied from MBD to
MBS-C. MBD displays the numeric temperature value of 2nd stage.
The input power for MBS-C is DC24V. When operating MBS-C with CRYO METER MBD,
manufactured by ULVAC CRYOGENICS, the input power can be supplied from MBD to
MBS-C. MBD displays the numeric temperature value of 2nd stage.
Refer to Figure 1-1 and 1-2 for the appearances of MBS-C and MBD. Please refer to MBD
instruction manual for details. We offer two types of MBD, MBD-S (100V type) and MBD-T
(200V type).
Refer to Figure 1-1 and 1-2 for the appearances of MBS-C and MBD. Please refer to MBD
instruction manual for details. We offer two types of MBD, MBD-S (100V type) and MBD-T
(200V type).
(
クライオポンプ内側
)
Cryogenic thermocouple: 500L
(Inside cryopump)
JAE Type (See Table 3-2)
K(CA) thermocouple: 500L or 1000L
Figure 1-1 CRYO METER MBS-C Figure 1-1 CRYO METER MBS-C
ULVAC CRYOGENICS INCORPORATED 1