No.10100‑2‑02‑2
Safety
-1
(Attached paper) Material Safety Data Sheet (MSDS)
The chemical material, which is applied or possible to contact when operating this
pump are described. Read this manual carefully to understand characteristics of the
chemical material (vacuum pump oil) which is described on MSDS sheet. When applying
other vacuum pump oils besides the description in this manual, contact your local
ULVAC SINKU‑KIKO Co., LTD Sales and Service Center.
MSDS presents the reference information of hazardous chemical material
to keep safety precautions. When handling the pump oil, it is necessary
to take proper and practical treatments which are adapted handling the
oil. After understanding the above mention, these treatments must be done.
Therefore, MSDS is a not safety warranty.
Attached Table Material Safety Data Sheet Vacuum Pump Oil SMR‑100
Section Ⅰ‑ Hazardous Ingredients/ Identity Information
Hazardous Components Other Limits
(Specific Chemical Identity; Common Name(S)) OSHA PEL ACGIH TLV Recommended %(optional)
*Mineral oil(Highly‑refined oil) n/e n/e n/e 100%
(*Hazardous Components) (n/e = not established)
Section Ⅱ‑ Physical/ Chemical Characteristics
Boiling Point (℃/ mmHg) 165℃/0.1mmHg
165℃/13Pa
Specific Gravity (H
2
O=1)
0.88(15/4℃)
Vapor Pressure (mmHg/℃) 1.0×10
‑４
mmHg/50℃
1.3×10
‑2
/50
Pour Point (℃)
‑15.0℃max.
Vapor Density (Air=1)
>1
Evaporation Rate
(Butyl Acetate=1)
<1
Solubility in Water
Negligible
Appearance and Odor
Light yellow, viscous liquid with slight oily odor
Section Ⅲ‑ Fire and Explosion Hazard Data
Flash Point(Method Used) (℃)
200min. (COC)
Flammable Limits
LEL UEL
1.0%
Extinguishing Media
Dry chemical, CO
2
, Foam
