Ulvac G-Tran Series, Руководство пользователя

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SK00-9663-E8-003-00
1. Specification
The Pirani vacuum gauge sensor unit SW100 is a vacuum gauge that can measure the
low vacuum pressure by connecting a dedicated sensor (SWP series).
SW100 is the next model to the conventional model SW1. SW100-A is compatible with
SW1-1, and SW100-R is compatible with SW1-2.
The following two types of interfaces are available. You can select the
specification that best suits the communication type.
Analog output type : SW100-A (Next model of SW1-1)
Serial communication type : SW100-R (Next model of SW1-2)
(Hereinafter, SW100 refers to both SW100-A and SW100-R.)
The I/O connector of SW100 uses a D-sub 15pin and USB Type-C.
SW100 is set with the dedicated Windows/Android application "UL-MOBI".
※ "UL-MOBI" can be downloaded from our homepage or Google Play. For details,
refer to the SW100 instruction manual.
※ USB Type-C can be connected to a Windows/Android device with UL-MOBI installed
using the USB cable, and can be monitored and set by UL-MOBI.
※ UL-MOBI for Windows requires a Windows device with a USB device driver
installed. For details, please refer to the SW100 instruction manual.
※ Settings that require UL-MOBI are SET POINT, OUTPUT, ADDRESS, BAUD RATE, and
CHECKSUM. For details, please refer to the SW100 instruction manual.
※ Windows/Android devices and USB cable are not included.
Name Pirani vacuum gauge sensor unit
Type Analog output Serial communication
Model SW100-A SW100-R
Compatible sensor
※ Includes the
selected one
Sensor for SW100: 1pc.
SWP-16 (NW16), SWP-25 (NW25), SWP-R1/8 (R1/8),
SWP-P18 ( φ 18mmtube), SWP-P15 ( φ 15mmtube),
SWP-CF16 (ICF034), SWP-1S (ASME BPE sanitary1”)
※ See Section 6.2
Measureable
pressure range (N
2
)
5×10 -2 Pa to 1×10 +5 Pa
Measurement
accuracy
※ 1
(N
2
)
1×10
-1
Pa to 1×10
+4
Pa :±10%
5×10
-2
Pa to 1×10
-1
Pa
1×10
+4
Pa to 1×10
+5
Pa
:±20%