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Ulvac EXO-13 Скачать руководство пользователя страница 6

EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13

INTRODUCTION

iv

３．ABOUT THE PRODUCT

The description and illustrations given in this manual are based on the information that was available at the
time when the manual was written. Therefore, the contents of this manual are subject to change without
notice. Before using the product, contact your local ULVAC representative or ULVAC Inc. to confirm the
latest information.

ULVAC products are warranted free from defects in material and workmanship for a period of twelve (12)
months from the date of shipping. In addition, about the parts exchanged for repair, we will consider as
possession of our company as long as there are no directions.

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Содержание EXO-13

Страница 1: ...INSTRUCTION MANUAL EXTERNAL OSCILLATOR UNIT FOR RF POWER SUPPLY MODEL EXO 13 3rd version 2023 07 01 ULVAC Inc Read this manual before operation this product Keep this manual at your hand for immediate...

Страница 2: ......

Страница 3: ...correctly Carefully read and fully understand Safety Cautions and Safety Keep this manual at your hand for immediate reference If this product is moved to other location attach this manual to it The c...

Страница 4: ...ous operation or inadequate maintenance or inspection Never try to operate the product before you read sections on operation inspection and maintenance and fully understand them Safety denotations are...

Страница 5: ...f a medium deg ree of injury or of serious damage to the product If you disagree with this caution it is possible that operator receives a minor injury or that this product comes down or needs adjustm...

Страница 6: ...contents of this manual are subject to change without notice Before using the product contact your local ULVAC representative or ULVAC Inc to confirm the latest information ULVAC products are warrant...

Страница 7: ...h as war 3 Malfunction or failure caused by inattention during handling or mistaken usage 4 A system modified disassembled or repaired without ULVAC s approval When it is confirmed that the sheet meta...

Страница 8: ...n both sides due to misunderstanding or misjudgment and allow us to take quick actions for repair If you encounter any trouble or come up with any question please contact us In your service call pleas...

Страница 9: ...OFIGURATION 3 SPECIFICATION 4 OUTPUT POWER AND ADAPTABLE POWER SUPPLY 4 PREPARATION 5 ACCESSORY AND OPTION 5 DC INPUT CONNECTOR 5 NAME AND FUNCTION OF THE PRODUCT PARTS 6 INSTALLATION AND CONNECTING I...

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Страница 11: ...el is damaged lost or illegible contact your local ULVAC representative IN B IN A POWER MODEL L N S N WEIGHT EXO 13 DC 8 32V 1VA Figure Location of nameplate CONTACT INFORMATION If you encounter any t...

Страница 12: ...igh frequency oscillations in the same phase up to two power supplies for standard and up to four power supplies by using the additional cables An external input terminal of connected power supply ter...

Страница 13: ...sts of the main body and two BNC cables and can supply the oscillation signal to two RF power supplies Fig 2 1 shows the system configuration RF POWER SUPPLY OSC RFS CABLE OUT1 OUT2 OUT3 OUT4 OSC IN O...

Страница 14: ...use for internal damage progress prevention Diode for input polarity reverse connection protection Environ ment Ambient temperature 5 to 40 Ambient humidity 35 to 80 not condensing Storage temperature...

Страница 15: ...and damage when opening 2 Standard accessory No Name Type Quantity 1 AC adapter Cable length 1m 1 2 Options No Name Type 1 OSC RFS cable Coaxial cable for output 1m 2m 4m 8m 16m 20m 1 Needed one for...

Страница 16: ...able and supplies electric power Both IN A and IN B are not used at the same time ADAPTER CABLE CLAMP Clip that prevents AC adaptor connector from coming off Used with AC adapter Oscillation signal ou...

Страница 17: ...and moment power failure How to install Place this unit on the flat and fix it Refer to Fig 3 2 as for the fixing screw positions Clearance The main body has natural air cooling system through the sid...

Страница 18: ...nfiguration WARNING Turn off your main breaker before input and output connector joint WARNING This unit does not have a power switch As soon as the input connector is plugged in and the electric powe...

Страница 19: ...n body has natural air cooling system through the side slit Please check whether the slit is clogged up with dust etc once half a year The parts life spans of this unit are as follows Table 4 1 Extern...

Страница 20: ...is not applied Connector is disconnected BNC cable is disconnected or in a bad connection Try it again after checking cable or changing connecting port In case of internal substrate failure part exch...

Страница 21: ...FOR RF POWER SUPPLY EXO 13 6 ATTACHED MATERIALS 11 ATTACHED MATERIALS External oscillator unit outside drawing OUT1 OUT2 OUT3 OUT4 115 44 110 145 IN B IN A POWER 80 131 Fig 6 1 External oscillator un...

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