EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
2．GENERAL DESCRIPTION
2
２.
GENERAL DESCRIPTION
This section describes character, construction and specification about this product.
２.１.
INTRDUCTION
This unit is designed as an external oscillation source for RF power supply. It outputs rated signal on a
single frequency of 13.56 MHz. Also, this unit is provided with 4 BNC output ports, and can make high
frequency oscillations in the same phase, up to two power supplies for standard and up to four power
supplies by using the additional cables.
* An external input terminal of connected power supply terminates at 50
Ω
and it is necessary to be
operated by 10mW to 100mW.
２.２.
CHARACTER
Stabilized oscillation frequency can be obtained by quartz crystal oscillation.
The high frequency oscillations can be made at the same time regarding four RF power supplies
that are provided with the external input port operated by 10mW to 100mW.
Unlike using a fan, natural air cooling does not make dust raise.