EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13
5．TROUBLESHOOTING
10
５.
TROUBLESHOOTING
The section describes action on trouble.
５.１.
TROUBLESHOOTING
If trouble occurs, diagnose it referring to table 5.1.
Table 5．1 Troubleshooting for RF Power Supply
No.
Trouble symptom
Possible cause and corrective action
1
POWER LED does not light.
Required voltage is not applied. Connector is disconnected.
2
RF does not output.
"External oscillation signal error"
is displayed on the RF power
supply.
Required voltage is not applied. Connector is disconnected.
BNC cable is disconnected or in a bad connection. Try it again
after checking cable or changing connecting port
In case of internal substrate failure, part exchange is needed.
Contact ULVAC.
3
When connected power supply is
increased, "External oscillation
signal error" is displayed on the RF
power supply.
The external oscillation signal input impedance of the connected
power supply is small, and so, more power is needed.
Refer to RF manual.
In case internal substrate adjustment is needed,
contact ULVAC.
In case of internal substrate failure, part exchange is needed.
Contact ULVAC.
Regarding errors for RF power supply or matching box, refer to each manual.