Ulvac DAU-20 Series, Инструкция по эксплуатации

Страница: 28 / 36

DAU-20 Instruction Manual
15
Tools to use No. 1, 2, 3, 4, 5, 6
Replacement work procedure
(Replacement procedure from the upper level)
1 Detach handle
⑤
at first.
2 Detach panel
①
of pump left and right.
3 Detach switch plug terminal and ground lead of the side that power cord is connected.
4 Loosen 6 pan head small screws and detach Casing Cover
⑦
.
5 Loosen 6 pan head small screws on pump top face and detach Valve Retainer Cover
②
.
6 Detach Valve Retainer
②
and loosen nuts that fixed Connecting Pipe
④
simultaneously and
detach the pipe.
7 Detach Valve and Pump Head, and Parallel Pin.
8 Insert a spanner of opposite side 13 mm (0.5") into Elongated Hole
⑥
on casing, and detach
Diaphragm.
9 In case spacers are attached to the diaphragm and connecting rod, attach the spacers when
replacing the diaphragm.
10 Attach new diaphragm and tighten with a spanner of opposite side 13 mm (0.5") lightly.
Afterwards, tighten with a torque spanner in 4N·m as final tightening.
11 Align a direction of the pump head and attach it on the diaphragm.(see P.09 for orientation)
12 Confirm a direction of a valve on the circular form shaped portion of pump head and attach it. (see
P.09 for orientation)
13 Insert Parallel Pins in the casing.
14 Attach Valve Retainer and tighten 6 pan head small screws alternatively. Finally, tighten it with a
torque driver (5 N
⋅
m).
15 Attach Connecting Pipe to L Form Coupling on Valve Retainer and tighten nuts with hands.
Afterwards, further tighten with a spanner of opposite side 17 mm (0.7") 1/4 to 3/4 turn.
16 Conduct replacement work on the lower level by following procedures 4 through 15 described
above.
The diaphragm is bonded on the casing in some model. In
such case, work after removing the diaphragm from the
casing by rotating a shaft.
CAUTION
If tighten too much with a spanner, it may cause cracked
nuts or leakage. Pay enough attention.
CAUTION