9
6. Maintenance
・
Inspection
・
Repair
6-1 Caution in Maintenance/Inspection/Repair
Maintenance / repair range that allowed to perform by repair engineers in the Customers are the
following 4 items. Do not conduct the other repair and remodeling other than Ulvac standard option.
1) Replacement of diaphragms
2) Replacement of valves
3) Replacement of inlet / exhaust filters
4) Replacement of O rings
6-2 Maintenance
During an operation of the vacuum pump, check the following items at least once in 3 days.
(1)
Generation of abnormal noise.
(2)
Abnormally hot temperature of the pump.
(3)
Normal exhausting.
When there is abnormality, conduct necessary measure according to "6-4. Trouble Check List".
See "Danger" (3) on P. 04.
See "Warning" (4) (17) (18) on P. 04. 05.
See "Attention" (12) on P. 07.
See "Caution" (9) (10) (11) on P. 06.
DANGER
WARNING
CAUTION
ATTENTION
