13
Chapter 5
Specification
Parameter
Value
Travel
110 mm x 75 mm (4.3" x 2.95")
Max Speed
250 mm/s*
Acceleration
2000 mm/s*
Bidirectional Repeatability
0.25 µm
Unidirectional Repeatability
0.25 µm
Backlash
N/A (No Leadscrew)
Min Incremental Movement
0.1 µm
Home Location Accuracy
0.25 µm
Max Load
2.2 lbs (1 kg)
*Note
Depending on the application, heavy loads may affect the stage performance
and/or stability.
Absolute On-Axis Accuracy
<3 µm
Max Percentage Accuracy
X-Axis (110 mm) 0.0027%
Y-Axis (75 mm) 0.004%
Settling Time within 1 µm (600 g load)*
0.1 sec
Settling Time within 0.1 µm (600 g load) *
0.6 sec
Limit Switches
X and Y as Standard
Bearing Type
High Rigidity Recirculating Precision Linear
Bearing
Motor Type
Brushless DC Linear Motor
Dimensions (Mid Travel)
10.24 x 9.06" x 1.22"
(260.0 mm x 230.0 mm x 31.1 mm)
Weight (with cables)
7.0 lbs (3.2 kg)
*Note
The default tuning parameters can be changed to optimise settling times for a
specific load.
Caution
The maximum speed and acceleration values quoted can be safely achieved with
the maximum load and a high duty cycle. However in this case, some heating of
the stage may occur and dimensional stability of the stage may be affected. This
could result in less than optimal repeatability and accuracy. For cases were
repeatability and accuracy are critical it is recommended that the stage
temperature is allowed to reach a steady state before measurements are taken.
Alternatively the load, acceleration and duty cycle should be reduced from the
maximum values. Some trial and error in setting these values may be necessary
before the ideal settings are attained.
