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10997-D02
MAX300 Series 3-Axis Flexure Stages
Fig. 1.2 MAX302 NanoMax piezo-actuated stage without feedback
The piezo-actuated models deliver 20 microns of travel, each piezo channel has a
coaxial SMC connector (see Fig. 1.1 and Fig. 1.2). In addition, the MAX301 has a 7-
pin LEMO connector for each feedback channel (see Fig. 1.1). A corresponding
number of leads for connection to the Thorlabs piezoelectric controllers are also
supplied.The piezo-actuated models deliver 20 microns of travel, with a coaxial SMC
connector for each piezo channel.
The pin functions for the Lemo connectorare detailed below.
Fig. 1.3 Feedback Lemo connector pin functions
Pin
Description
1
+15 V
2
Osci
3
0 V
4
Sig Out -
5
Sig Out +
6
-15 V
7
Travel
75 V
SMC connectors
5
4
3
2
1
7
6