OPERATION MENU’S
3. Abort Process Recipe
The abort instruction can be used to kill a running process recipe in case of emergencies.
Automatic abort commands can be implemented in the process recipe to handle out of
buzzer or sensor signal failure situation. A manual abort command can be issued in this menu
only.
Any abort command that is executed will reset the process recipe to “step 0” unless proper
abort recipes are used. See chapter Process Recipe for further details.
4. Clear Alarms
The clear alarm instruction will reset the current alarm list. The previous alarm list is also
reset when a process recipe is started from “step 0”.
5. Variable process Command
The variable process command is a list of preselected process parameters that have been
assigned to be variable. This list allows rapid change of setpoints without the use of the
“Recipe Editor”.
6. Select a Process Recipe
A list of all available process recipes allows the operator to select the desired recipe.
NOTE
Another process recipe can only be selected if the current recipe is in “step
0”.
7. Assign Control Zones to Paddle Inputs
Assigning control zones to paddle inputs allows internal (paddle) thermocouple signals to be
used in the DTC temperature control loop.
8. Edit Lot Id
A lot Id (a name) can be given here. Only its name, type, number of wafers and the slot
number can be entered. A batch of wafers often comes with Lot ID. Its name and content
(filler, test and/or process type) plus amount of each wafer type and its Lot number can be
stored.
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