OPERATION MENU’S
It is not possible to modify any of the parameters using this menu. The information is
updated once every second.
Figure 6-35 Monitor Menu
The Monitor Menu presents an overview of the available information. The following sub
menus can be selected:
1. Main Detail Status
This contains a summary of the main parameters including temperature, process recipe and
gasflow settings.
2. Alarm Status
This contains the list of current alarms and the alarm that have occurred during the process.
3. Digital Output/Input Status
This contains the settings of all Digital Outputs and all Digital Inputs including the
ON/OFF status and alarm monitoring.
4. DPC Lot Id Status
This contains the Lot ID used for the registration of type and number of the current wafers.
5. Process Recipe Status
This contains the list of all process and abort recipes stored in the DPC memory. It allows
safe review of a recipe without the possibility of modifying.
6. Temperature Status
This contains detailed information about the temperature status, including the setpoint and
the actual temperatures for the paddle and spike thermocouples, the deviation, ramp to, slope
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EFERENCE MANUAL
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