15.
Turn the interlock key back to its initial position.
16.
Turn off the “Main Power” switch on the power supply.
17.
For longer depositions (>500nm) you should allow at least five minutes for the
chamber to cool.
18.
After a sufficient amount of cooling time, go to the “Sample Unloading Instructions”
segment of this operation procedure.
Beam Position and Sweep Settings:
1.
Typically the beam is already in the correct position and does not require significant
adjustment.
2.
Open the shutter.
3.
If the beam is sweeping outside of the crucible, slowly adjust the longitudinal and
latitudinal beam position knobs until the beam is centered.
4.
Adjust longitudinal and latitudinal sweep knobs until the beam sweeps across the
entire surface of the metal melt in the crucible; the beam should not touch the crucible
walls.
5.
None of the sweep settings should ever be set to zero
.
6.
Return to step 10 of the “Deposition” segment of this operation procedure.
Sample Unloading Instructions:
1.
Record the sample unload time on the log sheet.
2.
Turn off the ion gauge.
3.
Press “Auto Stop” to vent the chamber.
4.
Open the chamber.
5.
Remove your samples.
6.
Make sure the sign indicates that the correct materials are located in the correct
crucible positions.
7.
Replace the glass slide that covers the view port. Put the used slide in the sharps
container.
8.
Close the chamber lid.
9.
Turn on the mechanical pump.
10.
Press the “Auto Start” button to pump down.
11.
Wait till the system is in high vacuum and turn off the mechanical pump by switching
the breaker to the off position.
12.
Note any comments or concerns in the “Comments” section of the log sheet.
13.
End of process.
