Temescal BJD-1800 Ebeam Evaporator (2) Operation
Procedure
Before you begin the process you must start your log book entry. Please write down your name,
date and the material you intend to evaporate on the log sheet.
Sample Loading Instructions:
1.
Turn off the ion gauge by pressing the “Filament On/Off” button on the ion gauge
control, unless it is already off.
2.
Press the “Auto Stop” button to vent the chamber. It will take approximately five
minutes for the chamber to reach atmospheric pressure.
3.
Open the chamber lid.
4.
Check that the glass slide mounted over the view port is clear. If not, replace it with a
new one.
5.
If you need to deposit a metal other than one of those that is already in the chamber,
open the shutter and remove one of the crucibles and replace it with the desired
material. The name of the material contained in each crucible is scribed on the
bottom surface of the crucible.
6.
If the crucible is less than half full, add more pellets. If the gold is low, notify Nano3
staff.
7.
Check the thickness monitor crystal usage (
See the “I/C5 Deposition Controller”
segment of this operation procedure
). Replace the crystal if necessary.
8.
Place your samples in the sample holder clips.
9.
Make sure that the chamber lid o-ring is properly seated and clean of debris.
10.
Close the chamber lid.
11.
Make sure the shutter control switch is in the “Auto” position.
12.
Record the load time on the log sheet.
Pump-down:
1.
Turn on the mechanical pump by switching the breaker to the on position.
2.
Press the “Auto Start” button. The system will automatically pump down.
3.
Once the system is in high vacuum, turn on the ion gauge by pressing the “Filament
On/Off” button on the ion gauge control.
4.
While the chamber is pumping down, set up your deposition recipe:
See the “I/C5
Deposition Controller” segment of this operation procedure
.
5.
When the system is in high vacuum, turn off the mechanical pump.
6.
Wait till the pressure reaches 1.0e-6T or less.
7.
Record the base pressure in the log sheet.
I/C5 Deposition Controller:
1.
Check crystal usage:
a.
Press “Sensors”.
