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Model 2002

Dual Sensor Vacuum Gauge

1.0E-05

1.0E-04

1.0E-03

1.0E-02

1.0E-01

1.0E+00

1.0E+01

1.0E+02

1.0E+03

1.0E-05

1.0E-04

1.0E-03

1.0E-02

1.0E-01

1.0E+00

1.0E+01

1.0E+02

1.0E+03

Pressure (Torr)

Ze

roe

d

 S

e

n

s

o

r O

u

tput

 (

A

rbit

ra

ry

 Unit

s

)

Pirani

Piezo

Figure  5.4

Содержание HASTINGS 2002

Страница 1: ...page 1 MODEL 2002 VACUUM GAUGE HASTINGS INSTRUCTION MANUAL ...

Страница 2: ...he user should incorporate immediately into the manual Addenda are numbered sequentially When a new revision is created all addenda associated with the previous revision of the manual are incorporated into the new revision of the manual Each new revision includes a revised copy of this print history page RevisionA Document Number 149 0798 September 1998 Hastings Instruments reserves the right to c...

Страница 3: ...tional Description 9 3 2 RUN Mode 10 3 3 HI and LOW Set Point Modes 11 3 4 CAL Mode 11 3 5 GAS Mode 13 3 6 UNITS Mode 14 4 0 REAR PANEL DESCRIPTION 15 4 1 Remote Zero Input 15 4 2 Analog Output 15 4 3 TTL Outputs 15 4 4 Power Entry Module 16 5 0 THEORY OF OPERATION 19 5 1 Piezoresistive Sensor 19 5 2 Pirani Sensor 21 5 3 Dual Sensor Operation 24 6 0 RS 232 OPTION BOARD 27 6 1 RS 232 E Interface Sp...

Страница 4: ...ay Board Specifications 33 7 2 Terminal Strip Connections 33 7 3 Operation 34 7 4 Relay Board Installation 34 8 0 TROUBLESHOOTING GUIDE 35 9 0 WARRANTY AND REPAIR 37 9 1 Warranty Policy 37 9 2 Non Warranty Repair Policy 37 10 0 DIAGRAMS AND DRAWINGS 39 ...

Страница 5: ...ment see Figure 5 3a deposited on a 1 micron thick Si3 N4 membrane The membrane is peripherally supported by a Si box shaped die and is covered by a thick Si lid parallel to the membrane and open on two ends see Figure 5 3b The piezoresistive unit is an ion implantedWheatstone bridge in a 1 micron thick Si membrane peripherally supported by a Si box shaped die which has been anodically bonded to a...

Страница 6: ...l interface board can be installed to provide RS232 or RS485 support The Model 2002 control unit fits a standard DIN 43700 insert 1 4 DIN and mounts into a 3 62 in 92 mm square hole The case is constructed of NORYL rated UL 94 V1 self extinguishing plastic and is equipped with mounting brackets that are adjustable up to 3 16 4 8mm The control unit case can be configured to be NEMA 12 compliant 1 4...

Страница 7: ...nd of transducer cable to transducer A finger tight connection is adequate for proper operation 6 If you have computer interface or process control options these cables can now be attached 7 I O port diagram is given in the manual 8 Connect theAC power cord The Model 2002 automatically adjusts for 90 245VAC 50 60 Hz 9 Turn on power switch Gauge is now reading pressure in units of Torr default 10 F...

Страница 8: ...he 8 pin circular DIN connector attaches to the back panel See Figure 4 1 The transducer cable connects to the left hand connector when looking at the back The transducer cable cannot connect to the I O DIN connector but the seven pin I O cable could be mistakenly connected to the eight pin sensor connector Ensure that the seven pin I O cable is plugged into the proper position I O Cable Attachmen...

Страница 9: ...on 3 2 for further information HIGH High set point is displayed in scientific notation above this pressure the HIGH TTL output will be 5V LOW Low set point is displayed in scientific notation below this pressure the LOW TTL output will be 5V CAL Pressure is displayed and can be adjusted GAS Gas number is displayed and selection may be changed UNITS Units used to display pressure are selected In th...

Страница 10: ...nA D frequency of about 60 Hz The speed can be adjusted two steps faster Each step will increase or decrease the A D frequency by a factor of two In RUN mode pushing the up arrow will speed up the A D converter one step and decrease the response time until the limit is reached 3 steps max Pressing the button after the limit is reached has no effect There will be no indication of the operating spee...

Страница 11: ...et point mode it will stay active in the following modes until the GAS mode is entered This will allow the user to set both setpoints and adjust the calibration without repeating the interlock bypass 3 4 CAL Mode Optimal performance of the Model 2002 is achieved by performing in situ adjustments to the calibration coefficient in the CAL mode There are three calibration coefficients These are the z...

Страница 12: ...arrows to adjust the display of the Model 2002 to match the pressure indicated by the reference If using the up and down arrows to adjust the display wait 20 seconds between presses to allow the adjustment to take affect 5 The unit is now fully zeroed Place the Model 2002 back in the RUN mode to store the zero in permanent memory Midrange Coefficient Adjustment The midrange coefficient corrects fo...

Страница 13: ... pressure levels where the direct force piezoresistive sensor is operative the instrument is gas composition insensitive and measures the true pressure regardless of gas composition The Pirani is gas compo sition sensitive so the actual composition must be known and the Pirani calibrated in that gas When the vacuum system s gas composition is dominated by a single gas species for example during sy...

Страница 14: ...ile this type of calibration download is not a true calibration it does allow the user to return the unit to a reasonable status from which a full calibra tion can be easily performed With the transducer at atmosphere place the 2002 in the UNITS mode Press the up and down arrows simultaneously UNITS light will flash Simultaneously press the ZERO button up and down arrows The 2002 will now read 760...

Страница 15: ...The output voltage corresponds to the following formula where Exp is equal to the expo nent of the displayed pressure and Mant is equal to the mantissa V is equal to the analog output voltage V Exp 6 0 5 Mant 1 0 18 If the analog output is being used in a data acquisition system the following formulas can be used to map the analog voltage into the measured pressure Exp Int 2 V 6 Mant 18 V Exp 6 2 ...

Страница 16: ...e fuse compartment open with the tab and slot in the power inlet chamber There is a spare fuse in the compartment within the fuse holder Figure 4 1 7 5 3 2 1 4 6 8 7 5 3 2 4 6 1 I OCONNECTOR Pin Connection 1 Analog Output 2 Analog Common 3 High Setpoint 4 Low Setpoint 5 Digital Common 6 Remote Zero 7 5V SENSORCONNECTOR Pin Connection 1 Sensor 2 Bridge sense 3 Bridge Power 4 Reference 5 Common 6 Co...

Страница 17: ...page 17 Figure 4 2 MODEL 2002 Analog Output VDC volts vs Pressure Torr ...

Страница 18: ...page 18 ...

Страница 19: ...ection at atmosphere or higher pressure and the membrane resistances change value as the differential pressure is decreased during pumpdown The resulting differential output is Vo SPV V1 where S is the sensitivity P is the pressure V is the applied bridge voltage V1 is the no load output voltage Since the sensitivity changes so dramatically with temperature some correction is required for compensa...

Страница 20: ...page 20 OHFWURQLFV ERDUG FRQWDLQV 3520 3LUDQL VHQVRU 3LH RUHVLVWLYH VHQVRU 72 5 7RS FDS DEOH FRQQHFWRU 7XEH VKHOO Figure 5 1 Dual Sensor Embodiment Preform ...

Страница 21: ...o produce an output signal that is proportional to the power supplied to the heated resistor by using the product of the current and voltage This rejects errors introduced by resistance changes since the sensor resistance is no longer part of the power equa tion A signal proportional to the power is obtained by multiplying the voltage across the heated sensor and the voltage impressed by the direc...

Страница 22: ...page 22 Figure 5 2 Pressure Diaphragm Diffused bridge resistors Backing surface or restrainer View A A ES e1 e2 Ground Ground Diffused bridge resistors A A ...

Страница 23: ...con lid x Membrane Silicon base TO 8 header Temperature compensation resistor Pt Silicon nitride membrane Heated sensor resistor Pt Silicon substrate Figure 5 3a Figure 5 3c Silicon lid Silicon base Membrane Er Es Eg Es Er Au ...

Страница 24: ...shown below We can expect then that Eg will be constant at high pressures and directly proportional to the pressure at low pressures Eg changes between these two controlling equations as the system passes through the transition region 0 01 Kn 1 Eg ar Lt 273 Th 1 2 Th Ta Ag P Where ar accomodation coefficient Lt free molecule thermal conductivity Th temperature of heated membrane Ta ambient tempera...

Страница 25: ... Vacuum Gauge 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 1 0E 05 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 Pressure Torr Zeroed Sensor Output Arbitrary Units Pirani Piezo Figure 5 4 ...

Страница 26: ...page 26 ...

Страница 27: ...us Data Rate 9600 baud Character Length Eight data bits Parity No parity Stop bits One stop bit PIN 25 PIN 1 NOTES 1 All signals are named with respect to the originating unit 2 All undesignated pins are to be left open Figure 6 1 6 2 Interface Connector Pin Assignments PIN MNEMONIC SIGNAL DESCRIPTION 2 TX Transmit Data Transmits data within RS 232 E voltage levels 3 RX Receive Data Accepts data w...

Страница 28: ... the same controller in a network scheme COMMAND SYNTAX In the following examples of syntax codes the special characters are explained The characters in square brackets represents a command string either upper or lower case command characters accepted All characters must follow each other in the string with no spaces or other characters The characters within wavy brackets contain choices for the a...

Страница 29: ...00000e 9 to 9 99999e 9 Modify Selected Gas G d CR 0To 4 Decimal Modify Selected Units U u CR T or M or P if Available Modify Decimation Ratio D dddd CR 63To 7936 Decimal Modify RS 485Address aa A aa CR 1To FF Hexadecimal ModifyTurnaround Delay aa T dd CR 0To 255 Decimal Notes The setpoints may also be entered as a decimal number e g H 760 99 CR will be same as entering H 7 6099E 2 CR When inputtin...

Страница 30: ...23e 3Torr 6 83e 2 to 1 365e 3 mbar 6 83e 4 to 1 365e 5 Pascal Set Midpoint Calibration CM m d E e CR 4 00e 0 to 7 999e 0Torr 5 34e 0 to 1 066e 1 mbar 5 34e 2 to 1 066e 3 Pascal Notes The calibration adjustment data may also be entered as a decimal number e g CF 760 99 CR will be same as entering CF 7 6099E 2 CR When inputting calibration adjustment data it must be within the valid range of the pre...

Страница 31: ...rror 2 Probe EEPROM Identification Error 1 Communications Syntax Error 4 Piezo Sensor Bad voltage out of range 2 Pirani Sensor Bad voltage out of range 1 High SetpointAlarm pressure exceeds setpoint 4 Low SetpointAlarm pressure less than setpoint 2 Gas Changed not the same as when unit last calibrated 1 6 4 Installation of RS 232 Board Materials needed for option board installation RS 232 option b...

Страница 32: ... front panel then carefully remove the front panel 5 Insert the RS 232 option board component side down into the top slot of the Model 2002 case and attach the board to the back panelusing the supplied jack screws 6 Connect the ribbon cable of the option board to the I O port P1 on the main PC board The brown wire of the cable denotes pin one and should be installed toward the front of the case 7 ...

Страница 33: ... terminal strip mounted through the rear panel of the Model 2002 7 1 Relay Board Specifications Each relay board consists of 2 Form C SPDT relays with the contacts wired in parallel Max switching power 120W 250VA 2A 125VAC 1A 250VAC Max switching voltage 220VDC 250VAC Max switching current 4A DC AC Max carrying current 6A DC AC UL CSA rating 1 2A 125VAC 1 2A 110VDC 4 0A 30VDC Terminal strip is des...

Страница 34: ...odel 2002 Remove the instrument from its mounting panel if necessary 3 Remove the option blanking panel from above the power inlet module on the rear panel Replace it with the relay board connector panel supplied in your upgrade kit Install the panel so that the text on the panel is oriented to the top and bottom of the unit 4 Un snap the bezel from the front of the case Remove the four screws fro...

Страница 35: ...ply for proper operation 4 Check theAC PCB connection a Remove the front panel by removing the bezel and four phillips head screws Disconnect AC power prior to removal of the front panel b Slide the display board and the main PCB out of the case c Verify that the white AC connector is firmly seated over all five pins of P4 The wire colors from front to back should be green black red yellow white 5...

Страница 36: ...oltage betweenTP 4 5 c Calculate the power power VTP3 VTP4 x VTP4 VTP5 154 the power level of a good tube should be 40 10mW 2 Consult the factory Symptom Control buttons not functional Action 1 Check membrane PCB connection a Remove the front panel b Verify that the 5 pin ribbon connector is firmly seated over all 5 pins of P2 The grey side of the ribbon cable should be toward the outside of the c...

Страница 37: ...f Hastings Instruments determines in good faith that it is defective in materials or workmanship during the warranty period Defective instruments should be returned to Hastings Instruments together with a written statement of the problem and a Return MaterialAuthorization RMA number Please consult the factory for your RMA number before returning any product for repair 9 2 Non Warranty Repair Polic...

Страница 38: ...page 38 ...

Страница 39: ...page 39 Diagrams and Drawings SECTION 10 ...

Страница 40: ... 03 KF 16 HPM 2002 01 05 KF 25 HPM 2002 01 06 Tube Outline Drawings all dimensions shown are approximate tm 2 35 59 7mm 2 30 58 4mm 2 30 58 4mm 1 20 30 5mm 1 20 diameter dimension of tube shell is typical on all HPM 2002 series tubes ...

Страница 41: ...NPT HPM 2002 01 01 1 2 O D Smooth Tube HPM 2002 01 07 1 4 VCR HPM 2002 01 02 2 3 4 Conflat HPM 2002 01 04 Tube Outline Drawings all dimensions shown are approximate tm 2 30 58 4mm 2 30 58 4mm 3 27 83mm 2 57 65 3mm ...

Страница 42: ...page 42 3 62 3 62 Panel Cut Out Dimensions Model 2002 Outline Dimensions 3 62 3 62 3 62 3 54 3 54 6 75 Model 2002 Outline Drawings all dimensions shown are approximate ...

Страница 43: ...page 43 NEOPRENE GASKET Panel Mounting Mounting Clip Attachment Deep Mounting Location Shallow Mounting Location ...

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