BA-PZ3_ML / F0354400
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Attention - Damage to device!
The plasma generator can be damaged if it is operated without air supply.
This would interrupt the supply of the cooling medium required during operation.
Never cover the air inlet and/or the nozzle outlet during operation.
The plasma generator can be damaged if electrically conductive objects are closer than
60 mm to the front third of the plasma generator during operation.
Exception
: Substrates in front of the module when using modules designed for this
purpose.
Note!
Under certain circumstances, the electric fields generated by the plasma generator can
damage sensitive electronic components. Make sure that the components of your
application are not affected by the plasma process.
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(ES) Equipements Scientifiques SA - Département Composants & Modules - 127 rue de Buzenval BP 26 - 92380 Garches
Tél. 01 47 95 99 84 - Fax. 01 47 01 16 22 - e-mail: [email protected] - Site Web: www.es-france.com
