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4

Precautions

Caution

4-1. Air piping

Hold the speed controller on the piping  port  

(Rc1/8) 

lightly and connect the tube.  Do not to apply excessive external 

force to the fittings.  The end lock may not operate correctly without using the two position five port valve. 

4-2

Installation

Tighten the bolts gradually and diagonally 

(star pattern when possible) 

by constant torque to avoid uneven force to 

the bolts. When installing the bonnet assembly and gate, refer to the maintenance procedure for tightening of the 
bolts.

Utilize OPEN condition when Bonnet assembly is installed.

Avoid scratching critical sealing surfaces during maintenance & installation

The compression of the O-rings on the user's application should target  0.7 to 0.9mm. 

Otherwise, improper compression could result in potential leak path.

Always use proper torque for fasteners, fittings, bolts, etc.. Otherwise bolt and valve body thread engagement could 
create valve damage.

4-3

Disinstallation

OPEN

valve prior to removal of Bonnet assembly during maintenance procedures. If Bonnet assembly is removed at 

CLOSE

condition then Body's threads and critical sealing surfaces could be damaged.

4-4

End lock release

When unlocking the Gate valve that has previously lost air pressure during emergency shut off.  First, apply pressure to 
the air port that was last energized.  The cycle should be finished that was in motion.  This completion of cycle that 
was not completed during pressure loss is critical to release end lock and switch the solenoid valve. 

Example 1

: The gate of the valve assembly is closed before shipment, so apply pressure to the closed position first. 

Example 2: 

If the gate is opened, apply pressure to the "

open

" side of air piping, and switch the valve after 

releasing the end lock.
The type of Gate valve design can vary gate configuration during shipment.   This is done to protect precision vacuum 
components throughout transport.

1. 

Insert type: Gate is OPEN so please supply the pressure to 

OPEN

port first.

2. 

With Body type: Gate is CLOSED so supply the pressure to 

CLOSE

port first.

Ignoring these concerns could lock the gate valve assembly, and potentially damaging components.

Содержание XGTP 312-50336-1CN

Страница 1: ...his operation manual thoroughly to understand Also refer to the drawing product information for structure and specification of this product Confirm operating environment is within operating specificat...

Страница 2: ...afety Instructions 3 pg 1 Specifications 5 pg 2 How to Order 6 pg 3 Construction Operation 7 pg 4 Precautions 9 pg 5 Spare Parts 11 pg 6 Maintenance 11 pg 7 Troubleshooting 12 pg Attachment Maintenanc...

Страница 3: ...failure when configuring the equipment 2 Only personnel with appropriate training should operate machinery and equipment The product specified here may become unsafe if handled incorrectly The assembl...

Страница 4: ...e incurred due to the failure of the product 3 Prior to using SMC products please read and understand the warranty terms and disclaimers noted in the specified catalog for the particular products 1 Th...

Страница 5: ...Switch D A93 Operating temperature 20 60 Main material of vacuum part Seal material FKM Mechanical parts Bellows AM350 Gate A6063 Body A5052 Bonnet A6061 Gate Bolt SUS316 Others SUS304 Piping size Rc...

Страница 6: ...sub connector CDE 9SF05 made by HIROSE ELECTRIC CO LTD is recommended for the connector female type XGTP 312 50336 1CN Applicable water size For 300mm wafer Valve type 1 Insert type Without body 2 Cas...

Страница 7: ...7 Figure 2A Figure 2B Figure 2C 3 Construction Operation Bonnet Assembly Figure 1...

Страница 8: ...em design and peripheral components can impact precision Gate valve performance by altering target operating pressures Fully completing OPEN CLOSE cycles are imperative to prevent damaging the valve c...

Страница 9: ...o removal of Bonnet assembly during maintenance procedures If Bonnet assembly is removed at CLOSE condition then Body s threads and critical sealing surfaces could be damaged 4 4 End lock release When...

Страница 10: ...Cover on the actuating part The cover shields internal components while the Gate valve is operating prevent injury 6 Remove the pneumatic tubing from valve operation and confirm cylinder has no pressu...

Страница 11: ...P300 2 1S XGTP31 50336 Bellows Assembly XGTP300 20AS XGTP31 50336 O Ring Body opening side FKM XGT300 9 10S XGTP31 50336 AS568 273 O ring Gate FKM XGT300 9 9S XGTP31 50336 1 AS568 271 Kalrez 4079 XGT3...

Страница 12: ...mage of Bellow assembly Replace Bellows assembly Deterioration of O ring by processing Replace with new O ring whose material compatible with process environment Scratches on the seal surface Polish o...

Страница 13: ...ure for maintenance 1 Pneumatically open gate valve 2 Loosen bolts at bonnetassembly 8pcs 3 Remove bonnet assembly from body Step 2 Remove Gate 1 Remove gate bolts 2pcs 2 Carefully remove gate from sh...

Страница 14: ...entation of washer and thrust washer during disassembly 3 Remove bellows assembly Remove bellows clamps 2pcs on Lever assembly The bellows should be handled carefully and cleaned with clean room grade...

Страница 15: ...ws clips Attach Bellows clips to Bellows assembly by mounting bolts Bellows is located in Bonnet assembly by mounting bolts Ensure that Bellows assembly is secured at collar Tightening torque 3 0 0 3...

Страница 16: ...ve with clean room grade alcohol and wipes ethanol grade 1 Alpha wiper equivalent Careful handling is critical to prevent scratches and dents to seal surface of O ring groove Note When removing O ring...

Страница 17: ...ng groove 2 Tighten Bolts 8pcs Tightening torque 17 5 2 Nm Step 6 Install Gate 1 Mounting Gate to Shaft Confirm proper orientation of gate when installing on shaft Reference groove for Gate O ring 2 A...

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