
Linearity
Linearity,
, Hyteresis
Hyteresis
0
0
2
25
5
5
50
0
7
75
5
–1
–1
–0.6
–0.6
–0.8
–0.8
–0.4
–0.4
–0.2
–0.2
0.6
0.6
0.4
0.4
0.2
0.2
0
0
0.8
0.8
1
1
100
100
O
O
u
u
t
t
p
p
u
u
t
t
d
d
e
e
v
v
i
i
a
a
t
t
i
i
o
o
n
n
f
f
a
a
c
c
t
t
o
o
r
r
(
(
%
%
F
F
. .
S
S
. .
)
)
Input signal (%F.S.)
Input signal (%F.S.)
Repeatability
Repeatability
1
2
3
4
1
2
3
4
–1
–1
–0.5
–0.5
0.5
0.5
0
0
1
1
5
5
O
O
u
u
t
t
p
p
u
u
t
t
d
d
e
e
v
v
i
i
a
a
t
t
i
i
o
o
n
n
f
f
a
a
c
c
t
t
o
o
r
r
(
(
%
%
F
F
. .
S
S
. .
)
)
Count
Count
With 50% of signal input
With 50% of signal input
Supply pressure: 1.0 MPa
Supply pressure: 1.0 MPa
Pressure Characteristics
Pressure Characteristics
0
0..4
4
0
0..6
6
0
0..8
8
1
1..0
0
–1
–1
–0.5
–0.5
0.5
0.5
0
0
1
1
1.2
1.2
O
O
u
u
t
t
p
p
u
u
t
t
d
d
e
e
v
v
i
i
a
a
t
t
i
i
o
o
n
n
f
f
a
a
c
c
t
t
o
o
r
r
(
(
%
%
F
F
. .
S
S
. .
)
)
Supply pressure (MPa)
Supply pressure (MPa)
Flow Characteristics
Flow Characteristics
0
1
2
3
4
5
6
0
1
2
3
4
5
6
0
0
200
200
300
300
100
100
400
400
900
900
800
800
500
500
600
600
700
700
1000
1000
7
7
S
S
e
e
t
t
p
p
r
r
e
e
s
s
s
s
u
u
r
r
e
e
(
(
k
k
P
P
a
a
)
)
Flow rate (L/min (ANR))
Flow rate (L/min (ANR))
100kPa
100kPa
200kPa
200kPa
300kPa
300kPa
800kPa
800kPa
900kPa
900kPa
700kPa
700kPa
600kPa
600kPa
500kPa
500kPa
400kPa
400kPa
50kPa
50kPa
Set pressure: 0.45 MPa
Set pressure: 0.45 MPa
Series ITV005
Series ITV005
Out
Out
Return
Return
Out
Out
Return
Return
162
162
Series
Series
ITV0000
ITV0000