202
202
P
P
r
r
e
e
s
s
s
s
u
u
r
r
e
e
Electro-Pneumatic Regulator
Electro-Pneumatic Regulator
ITV1000/2000/3000-X410
ITV1000/2000/3000-X410
Information
Information
Polishing equipment and
Polishing equipment and
peripheral equipment for wafers,
peripheral equipment for wafers,
LCD glasses, color filters, etc.
LCD glasses, color filters, etc.
CMP equipment
CMP equipment
Control of polishing head pressure
Control of polishing head pressure
Linearity:
Linearity:
0.5
0.5
% F.S. or less
% F.S. or less
Air
Air
Set pr0.1 MPa
Set pr0.1 MPa
1.0 MPa (Pressure range 0.1 MPa type:
1.0 MPa (Pressure range 0.1 MPa type:
0.2 MPa)
0.2 MPa)
1.5 MPa (Pressure range 0.1 MPa type:
1.5 MPa (Pressure range 0.1 MPa type:
0.3 MPa)
0.3 MPa)
1 MPa (Pressure range 0.1 MPa type: 0.2 MPa)
1 MPa (Pressure range 0.1 MPa type: 0.2 MPa)
1: 0.005 to 0.1 MPa, 3:
1: 0.005 to 0.1 MPa, 3:
0.005 to 0.5 MPa, 5: 0.005 to
0.005 to 0.5 MPa, 5: 0.005 to
0.9 MPa
0.9 MPa
0: 24 VDC
0: 24 VDC
10%, 1: 12 to 15 VDC
10%, 1: 12 to 15 VDC
0: 4 to 20 mA, 1: 0 to 20 mA, 2: 0 to 5 VDC, 3: 0 to 10 VDC
0: 4 to 20 mA, 1: 0 to 20 mA, 2: 0 to 5 VDC, 3: 0 to 10 VDC
Voltage type: Approx. 6.5 k
Voltage type: Approx. 6.5 k
, Current type: 250
, Current type: 250
or less
or less
Analog output: 1 to 5 VDC/4 to
Analog output: 1 to 5 VDC/4 to
20 mA DC, Switch output (NPN/PNP)
20 mA DC, Switch output (NPN/PNP)
0.5% or less (Full span)
0.5% or less (Full span)
0.5% or less (Full span)
0.5% or less (Full span)
0.5% or less (Full span)
0.5% or less (Full span)
0.2% or less (Full span)
0.2% or less (Full span)
0.12% or less (Full span)/
0.12% or less (Full span)/
C
C
2% F.S.
2% F.S.
1 digit
1 digit
MPa: 0.001, kgf/cm
MPa: 0.001, kgf/cm
2
2
: 0.01, bar: 0.01, psi: 0.1, kPa: 1
: 0.01, bar: 0.01, psi: 0.1, kPa: 1
0 to 50
0 to 50
C (No
C (No
condensation)
condensation)
IP65
IP65
ITV10
ITV10
: Approx. 250 g, ITV20
: Approx. 250 g, ITV20
: Approx. 350 g, ITV30
: Approx. 350 g, ITV30
: Approx. 645 g
: Approx. 645 g
(without brackets)
(without brackets)
0.12 A or less (24 VDC
0.12 A or less (24 VDC
10% type)
10% type)
0.18 A or less (12 to 15
0.18 A or less (12 to 15
VDC type)
VDC type)
Fluid
Fluid
Minimum supply pressure
Minimum supply pressure
Maximum supply pressure
Maximum supply pressure
Proof pressure
Proof pressure
Set pressure range
Set pressure range
Power supply voltage
Power supply voltage
Current consumption
Current consumption
Input signal
Input signal
Input impedance
Input impedance
Output signal
Output signal
Linearity
Linearity
Hysteresis
Hysteresis
Repeatability
Repeatability
Sensitivity
Sensitivity
Temperature characteristics
Temperature characteristics
Output pressure display
Output pressure display
Ambient and fluid temperature
Ambient and fluid temperature
Enclosure
Enclosure
Weight
Weight
(Supply side)
(Supply side)
(Output side)
(Output side)
Accuracy
Accuracy
Minimum unit
Minimum unit
Specifications
Specifications
RoHS
RoHS
ITV3000
ITV3000
ITV2000
ITV2000
ITV1000
ITV1000
0
0
1
1
0
0
0
0
Input signal (% F.S.)
Input signal (% F.S.)
O
O
u
u
t
t
p
p
u
u
t
t
p
p
r
r
e
e
s
s
s
s
u
u
r
r
e
e
(
(
M
M
P
P
a
a
)
)
Rated
Rated
pressure
pressure
Standard model
Standard model
1% F.S.
1% F.S.
-X410
-X410
0.5% F.S.
0.5% F.S.
The above characteristics (specification
The above characteristics (specification
s) are confined to
s) are confined to
the static state. When air
the static state. When air
is consumed on the output side,
is consumed on the output side,
the pressure may fluctuate.
the pressure may fluctuate.
Application examples
Application examples
1
1
Akihabara UDX 15F,
Akihabara UDX 15F,
4-14-1, Sotokanda, Chiyoda-ku,
4-14-1, Sotokanda, Chiyoda-ku,
Tokyo 101-0021, JAPAN
Tokyo 101-0021, JAPAN
http://www.smcworld.com
http://www.smcworld.com
SMC Corporation
SMC Corporation
11-E583
11-E583
D-SZ Printing QS 8100SZ
D-SZ Printing QS 8100SZ
©201
©201
2 SMC Corpo
2 SMC Corpo
ration All Rights Reserve
ration All Rights Reserve
d
d