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HRX-OM-I051
Chapter 8 Appendix
8.7 Compliance
HRZ Series
8-24
8.7 Compliance
This system conforms to the following standards.
Table 8-14 Compliance
CE Marking
EMC Directive 2004/108/EC
Low Voltage
Directive
2006/95/EC
Machinery
Directive
2006/42/EC
SEMATECH
S2-93, S8-95
SEMI
S2-0703, S8-0701, F47-0200
UL
E229305 / UL1995
Содержание HRZ001-H
Страница 6: ...HRX OM I051 Table of Contents HRZ Series TOC 4...
Страница 40: ...HRX OM I051 Chapter 3 Transporting and Installation 3 3 Procedure for Installation HRZ Series 3 16...
Страница 46: ...HRX OM I051 Chapter 4 System Startup and Shutdown 4 5 System Startup and Shutdown HRZ Series 4 6...
Страница 62: ...HRX OM I051 Chapter 5 System Operation 5 4 Examples of System Operation HRZ Series 5 16...
Страница 66: ...HRX OM I051 Chapter 6 Error Message and Troubleshooting 6 2 Troubleshooting HRZ Series 6 4...