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Series 820 Instruction Manual

Appendix A

IM-82-C

A-7

Actual Gas

Chemical

Symbol

K-factor

Relative N2

Cp

(Cal/g)

Density

(g/l) @ 0

°

C

Elastomer

O-ring*

Dichloromethylsilane

(CH

3

)

 2

SiCl

2

.25

.1882

5.758

Dichlorosilane

SiH

2

Cl

2

.40

.150

4.506

Dichlorotetrafluoroethane
(Freon-114)

C

2

Cl

2

F

4

.22

.1604

7.626

1,1-Difluoroethylene
(Freon-1132A)

C

2

H

2

F

2

.43

.224

2.857

Dimethylamine

(CH

3

)

 2

NH

.37

.366

2.011

Dimethyl Ether

(CH

3

)

 2

O

.39

.3414

2.055

2,2-Dimethylpropane

C

3

H

12

.22

.3914

3.219

Ethane

C

2

H

6

.50

.4097

1.342

Ethanol

C

2

H

6

O

.39

.3395

2.055

EthylAcetylene

C

4

H

6

.32

.3513

2.413

Ethyl Chloride

C

2

H

5

CI

.39

.244

2.879

Ethylene

C

2

H

4

.60

.1365

1.251

Ethylene Oxide

C

2

H

4

O

.52

.268

1.965

Fluorine

F

2

.980

.1873

1.695

Fluoroform (Freon-23)

CHF

3

.50

.176

3.127

Freon-11

CCI

3

F

.33

.1357

6.129

Freon-12

CCI

2

F

2

.35

.1432

5.395

Freon-13

CCIF

3

.38

.153

4.660

Freon-13

B1 CFrF

3

.37

.1113

6.644

Freon-14

CF

4

.42

.1654

3.926

Freon-21

CHCI

2

F

.42

.140

4.952

Freon-22

CHCIF

2

.46

.1544

3.858

Freon-113

CCI

2

FCCIF

2

.20

.161

8.360

Freon-114

C

2

Cl

2

F

4

.22

.160

7.626

Freon-115

C

2

ClF

5

.24

.164

6.892

Freon-C318

C

4

F

6

.17

.185

8.397

Germane

GeH

4

.57

.1404

3.418

Germanium Tetrachloride

GeCL

4

.27

.1071

9.565

Helium

He

1.454

1.241

.1786

Hexafluoroethane
(Freon-116)

C

2

F

6

.24

.1834

6.157

Hexane

C

6

H

14

.18

.3968

3.845

Hydrogen

H

2

1.01

3.419

.0899

Hydrogen Bromide

HBr

1.000

.0861

3.610

Hydrogen Chloride

HCl

1.000

.1912

1.627

KR

Hydrogen Cyanide

HCN

1.070

.3171

1.206

Hydrogen Fluoride

H F

1.000

.3479

.893

KR

Hydrogen Iodide

H I

1.000

.0545

5.707

Hydrogen Selenide

H

2

Se

.79

.1025

3.613

Hydrogen Sulfide

H

2

S

.80

.2397

1.520

Iodine Pentafluoride

IF

5

.25

.1108

9.90

Isobutane

CH(CH

3

)

3

.27

.3872

3.593

Isobutylene

C

4

H

8

.29

.3701

2.503

Krypton

Kr

1.453

.0593

3.739

Methane

CH

4

.72

.5328

.715

Methanol

CH

3

OH

.58

.3274

1.429

Methyl Acetylene

C

3

H

4

.43

.3547

1.787

Methyl Bromide

CH

2

Br

.58

.1106

4.236

Methyl Chloride

CH

3

Cl

.1926

2.253

Methyl Fluoride

CH

3

F

.68

.3221

1.518

* If no O-ring material is specified then O-ring to be used is Viton

Содержание Top-Trak 820 Series

Страница 1: ...ss Flow Meters Instruction Manual Part Number IM 82 Revision C 06 99 5 Harris Court Building L Monterey CA 93940 831 373 0200 800 866 0200 Fax 831 373 4402 http www sierrainstruments com Sierra Instruments b v Bolstoen 30A 1046 AV Amsterdam The Netherlands 31 0 20 6145810 Fax 31 0 20 6145815 ...

Страница 2: ...low application COPYRIGHT SIERRA INSTRUMENTS 1994 No part of this publication may be copied or distributed transmitted transcribed stored in a retrieval system or translated into any human or computer language in any form or by any means electronic mechanical manual or otherwise or disclosed to third parties without the express written permission of Sierra Instruments The information contained in ...

Страница 3: ...VDC Output Signal Wiring 2 5 Optional 4 20 mA Output Signal Wiring 2 5 Remote Display Installation 2 6 Chapter 3 Operation Transducer Operation 3 1 Transducer Accuracy 3 1 Referencing the Transducer to Non Standard Conditions 3 2 Transducer Over Ranging 3 2 Zero and Span Adjustments 3 3 Chapter 4 Maintenance and Repair Transducer Cleaning 4 1 Flow Path Cleaning Model 822 824 4 2 Inlet and Outlet S...

Страница 4: ...ns 2 3 2 2 Transducer D Connector Pin Assignments 2 4 2 3 Standard 0 5 VDC Output Signal Wiring 2 5 2 4 Single Transducer Current Loop Connection 2 5 2 5 Multiple Transducer Current Loop Connections 2 6 2 6 Mounting the Remote Display 2 6 4 1 Model 822 824 Flow Components 4 2 4 2 Correct LFE Position 4 3 4 3 Model 826 827 Flow Components 4 4 4 4 Low Flow Transducer LFE Cleaning 4 5 4 5 Medium Flow...

Страница 5: ...nsducer service calibration or troubleshooting procedures Caution When using toxic or corrosive gases purge the unit thoroughly with inert dry gas before disconnecting from the gas line Caution Printed circuit boards are sensitive to electrostatic discharge To avoid dam aging the board follow these precautions to minimize the risk of damage before handling the assembly discharge your body by touch...

Страница 6: ...Table of Contents Series 820 Instruction Manual 0 6 IM 82 C ...

Страница 7: ...ocess connections for flexibility and versatility The primary standard calibration ensures starting point accuracy and NIST traceability The meterÕs 0 5 VDC or 4 20 mA output signal is provided for recording data logging or control The optional dis play reads the mass flow rate directly in engineering units or per centage of full scale Using This Manual This manual is organized into four chapters ...

Страница 8: ...r accessories are not discarded with the packing material Do not return any equipment to the factory without first contacting Sierra Customer Service Technical Assistance If you encounter a problem with your transducer review the configu ration information for each step of the installation operation and set up procedures Verify that your settings and adjustments are consis tent with factory recomm...

Страница 9: ...utput signal is optionally available Input power and output signal connections are made via the 9 pin sub type D connector located on the side of the transducer An additional input power jack is located just below the D connector It is important to connect input power at only one location The transducer shown below is a typical example of a 822 Series Top Trak Mass Flow Meter Other models may vary...

Страница 10: ...rates a pres sure drop P1ÐP2 forcing a small fraction of the total flow to pass through the sensor tube m1 Figure 1 2 Flow Paths through the Transducer Two resistance temperature detector RTD coils around the sensor tube direct a constant amount of heat H into the gas stream In ac tual operation the gas mass flow carries heat from the upstream coil to the downstream coil The resulting temperature ...

Страница 11: ...nts of heat Make sure to allow adequate space for cable connectors and wiring 3 For 1 2 inch size inlet outlet process connections on models 826 and 827 make sure the location meets the minimum number of recommended pipe diameters upstream and downstream of the transducer A minimum of 5 inches 127 mm upstream and 2 1 2 inches 64 mm downstream is always recommended not necessary for other models 4 ...

Страница 12: ...wrench For 1 2 inch size tighten the nut 1 1 4 turns from finger tight For 1 8 inch 1 4 inch and 3 8 inch sizes tighten only 3 4 turn from fin ger tight Do not over tighten 3 Check the system s entire flow path thoroughly for leaks Do not use liquid leak detectors instead monitor pressure decay Over exposing the transducer to leak detector fluid may damage the unit VCO and VCR Fittings 1 Position ...

Страница 13: ... 2 Inch Size NPT Connections Models 826 827 only 1 Install a section of straight pipe at least ten pipe diameters in length upstream of the transducer Also allow at least five pipe diameters downstream for accurate operation DO NOT use reducers If the preceeding components in the flow path create disturbances extend the upstream pipe length 2 Position the transducer with the flow direction arrow p...

Страница 14: ...sult in unreliable operation The transducer s standard 0 to 5 VDC 4 20 mA optional output signal is available through the D connector The mating connector is included with the transducer Connection details are given on the following pages When the transducer is configured for a remote display signal con nections are made via the 9 pin connector Input power connections are not included in the stand...

Страница 15: ...t power and output signal connections Figure 2 3 Standard 0 5 VDC Output Signal Wiring Optional 4 20 mA Output Signal Wiring The optional 4 20 mA output signal flows from Pin 9 4 20 mA Out through the load 50 to 500 Ohms maximum to Pin 7 Power Com mon The figure below is a typical example of input power and out put signal connections Multiple transducer current loop output con nections are given o...

Страница 16: ...2 C Figure 2 5 Multiple Transducer Current Loop Connections Remote Display Installation Mount the remote display at a convenient location within reach of the supplied interface cable The maximum cable length is 100 feet 30 m Figure 2 6 Mounting the Remote Display ...

Страница 17: ...t signal will then drop to zero or 4 mA depending on output con figuration Allow at least thirty minutes of warm up time 2 For first time start ups perform an initial zero output check as described on page 3 3 After checking the initial zero setting the transducer is ready to monitor the gas mass flow rate Transducer Accuracy The standard accuracy of Top Trak is 1 5 of full scale The 1 5 of full s...

Страница 18: ...your transducer is located see Appendix A Transducer Over Ranging If the flow rate exceeds the full scale value listed on the transducer nameplate the output signal and digital display if so equipped will read a higher value The transducer is not calibrated for over ranged flows and will probably be both non linear and inaccurate Over range conditions are indicated by the display and or output sig...

Страница 19: ...e attempting any adjustments Set gas flow to zero Confirm that no flow exists 2 Connect a digital multimeter to Pin 3 0 5 Out or Pin 9 4 20 Out and Pin 7 Power Common Check the reading If it does not indi cate 0 05 VDC or 4 0 016mA adjust the zero potentiometer Since the output does not indicate negative numbers it is neces sary to adjust down from a slightly positive reading Begin by slowly rotat...

Страница 20: ...Chapter 3 Operation Series 820 Instruction Manual 3 4 IM 82 C ...

Страница 21: ... in this chapter are general instructions for Transducer Cleaning Instructions page 4 1 Transducer Calibration page 4 9 Transducer Troubleshooting page 4 11 Returning Equipment to the Factory page 4 12 Transducer Cleaning Due to transducer design variations separate cleaning instructions are given in this chapter for each of the following models Model 822 824 with nylon flow body Model 826 827 wit...

Страница 22: ...let and outlet fittings 2 Pull out the laminar flow element LFE holddowns 3 Replace or clean the inlet and outlet screens 4 Re assemble components When the transducer is installed in the system leak test the connection 5 To be within the original accuracy calibrate the transducer see page 4 9 Caution When using toxic or cor rosive gases purge the unit thoroughly with inert dry gas before disconnec...

Страница 23: ...tly tapered shape with the larger diameter on the upstream inlet side To remove use a blunt object which does not mar the flow channels to push the LFE from the outlet side to the inlet side A 3 8 inch 9 mm nut driver works well 3 Clean the LFE using a suitable solvent Make sure to carefully clean all active flow channels in the LFE 4 Re install the LFE making sure to press it in the correct dista...

Страница 24: ...tion of the three 3 LFE elements 3 To remove the LFE use a blunt object which does not mar the flow channels to push the LFE from the flow body 4 Clean the LFE using a suitable solvent Make sure to carefully clean all active flow channels in the LFE 5 Re install the LFE making sure to position it with both ends even with the transducer flow body 6 Re assemble remaining components When the transduc...

Страница 25: ...or this purpose To access the components 1 Remove the transducer from the system 1 The inlet filter screen is held in place in the inlet fitting by the LFE Disassemble by holding the fitting steady with a wrench and unscrewing the LFE with a medium flat tipped screwdriver 2 Remove the LFE assembly taking care not to bend the inlet screen Inspect the sealing O ring and replace if necessary In spect...

Страница 26: ...nd cap Note the position of the screws one has a shorter length 3 Remove the LFE assembly taking care not to bend the inlet screen Inspect the sealing O ring and replace if necessary In spect the inlet screen and replace if corroded or damaged Light to medium particulate contamination can be cleaned by back washing with a suitable solvent Air dry thoroughly 4 Inspect the honeycomb element for dama...

Страница 27: ... can be cleaned by back washing with a suitable solvent Air dry thoroughly 4 Inspect the sealing O ring for damage and replace if necessary The inlet screen is mounted with the fine mesh side facing the inlet 5 To remove the LFE loosen and remove the four threaded rods holding the end cap to the main flow body Separate the end cap from the main flow body and remove the LFE assembly The LFE assembl...

Страница 28: ...ess port plugs with a 1 4 inch Allen wrench Visually inspect the sensing ports and sensor 1 Use a hemostat or tweezers to push the cleaning wire into the downstream opening of the sensor tube Do not force the cleaning wire move it back and forth DO NOT TWIST OR ROTATE 2 Flush the sensor tube with a non residuous solvent compati ble with the O ring material In cases where solids are deposited in se...

Страница 29: ...ge skip Step 2 and Step 3 If linearity does not need adjustment complete only Steps 1 through 3 Step 1 Warm Up Plug in the unit to be calibrated and allow at least 30 minutes warm up time before attempting any adjustments Step 2 Zero Adjust Slide open the zero and span access doors Connect a DVM or mul timeter to the transducer output pins Adjust the zero potentiometer for 0 0 volts 4 mA at zero f...

Страница 30: ... Step 5 Zero Adjust Connect a DVM to the transducer output pins Adjust the zero po tentiometer for 0 0 volts 4 mA at zero flow Step 6 Calibrate 25 Use the calibration standard to set a flow rate of 25 of full scale Adjust the span potentiometer for 1 25 volts 8 mA at the output of the transducer Step 7 Calibrate 50 Increase the flow rate to 50 of full scale If the output is within 0 05 V 0 2 mA no...

Страница 31: ...ive Plug in power supply Clean or replace screen Return to factory for cleaning Return to factory for repair Unit will not zero Gas leak Application requires high pres sure and non horizontal mount ing PCB defective Find and correct leaks Re zero transducer see Chapter 3 Return to factory for repair Reads full scale with no flow Gas leak Liquid present in system Defective sensor Find and correct l...

Страница 32: ...tor or contact one of our offices directly Our expedite fees are three day turnaround 25 two day turn around 40 Please follow these easy steps to return your instrument for factory service 1 Obtain a Return Materials Authorization Form RMA with assigned number from Sierra Instruments You may obtain this from the factory by calling 800 866 0200 between 8 00 a m and 5 00 p m PST Monday through Frida...

Страница 33: ... sierra instruments nl Asia Sales Service Center PHONE 86 203435 4870 FAX 86 203435 4872 IMPORTANT SAFETY NOTE ABOUT PURGING WARNING When toxic or corrosive gases are used purge unit thoroughly with inert dry gas before disconnecting from the gas line to prevent personnel from being injured when coming in contact with the instrument WARNING If an instrument used with a toxic or corrosive gas is re...

Страница 34: ...d conditions sccm or slm Q2 The gas mass flow rate referenced to the new standard or actual conditions sccm or slmÑÒSÓ means Òstandard Ó accm or almÑÒAÓ means ÒactualÓ P Absolute pressure kg cm2 or psia and T Absolute temperature K or R K C 273 R F 460 Example 1 Changing ÒStandardÓ Conditions If your transducer has a flow rate reading of 10 00 slm and was calibrated at standard conditions of 70 F ...

Страница 35: ...s toxic flammable corrosive etc 2 Interpreting the reading of a flow meter or flow controller which has been calibrated with a gas other than the actual gas In applying the tables the following fundamental relationship is used Q1 Q2 K1 K2 1 Where Q The volumetric flow rate of the gas referenced to standard conditions of 0 C and 760 mm Hg sccm or slm K The K factor defined in equation 6 1 Refers to...

Страница 36: ...e gas given by the following table Number of Atoms in the Gas Molecule N Monatomic 1 040 Diatomic 1 000 Triatomic 0 941 Polyatomic 0 880 The mass flow rate m can also be written as m Q r 3 Where r The gas mass density at standard conditions g l r is given in the tables at 0 C 760 mm Hg Furthermore the temperature difference DT is proportional to the output voltage E of the mass flow meter or DT aE...

Страница 37: ...ables is preferred because in many cases it was obtained by experiment Sierra calibrates every transducer with primary standards using the actual gas or a molecular equivalent reference gas The cali bration certificate accompanying the transducer cites the reference gas used Example 1 A transducer is calibrated for nitrogen N2 and the flow rate is 1000 sccm for a 5 000 VDC output signal The flow r...

Страница 38: ...2 m T 2 The equivalency relationships for r Cp and N for mixtures of more than two gases have a form similar to the dual gas relation ship given above IMPORTANT NOTE ABOUT K FACTORS Please note that if you have a transducer calibrated for a gas such as methane and wish to use the K factors to measure a gas such as air that the inaccuracy of the measurement can range from 5 to 10 The use of K facto...

Страница 39: ...tane C4H8 TRANS 291 374 2 503 Carbon Dioxide CO2 74 2016 1 964 Carbon Disulfide CS2 60 1428 3 397 Carbon Monoxide CO 1 00 2488 1 250 Carbon Tetrachloride CCl4 31 1655 6 860 Carbon Tetrafluoride Freon 14 CF4 42 1654 3 926 Carbonyl Fluoride COF2 54 1710 2 945 Carbonyl Sulfide COS 66 1651 2 680 Chlorine CL2 86 114 3 163 Chlorine Trifluoride CIF3 40 1650 4 125 Chlorodifluoromethane Freon 22 CHClF2 46 ...

Страница 40: ... 926 Freon 21 CHCI2F 42 140 4 952 Freon 22 CHCIF2 46 1544 3 858 Freon 113 CCI2FCCIF2 20 161 8 360 Freon 114 C2Cl2F4 22 160 7 626 Freon 115 C2ClF5 24 164 6 892 Freon C318 C4F6 17 185 8 397 Germane GeH4 57 1404 3 418 Germanium Tetrachloride GeCL4 27 1071 9 565 Helium He 1 454 1 241 1786 Hexafluoroethane Freon 116 C2F6 24 1834 6 157 Hexane C6H14 18 3968 3 845 Hydrogen H2 1 01 3 419 0899 Hydrogen Brom...

Страница 41: ...4 4 418 Phosphine PH3 76 237 1 517 Phosphorous Oxychloride POCl3 36 1324 6 843 Phosphorous Pentafluoride PH5 30 1610 5 620 Phosphorous Trichloride PCl5 30 1250 6 127 Propane C3H8 36 3885 1 967 Propylene C3H6 41 3541 1 877 Silane SiH4 60 3189 1 433 Silicon Tetrachloride SiCl4 28 1270 7 580 Silicon Tetrafluoride SiF4 35 1691 4 643 Sulfur Dioxide So2 69 1488 2 858 Sulfur Hexafluoride SF6 26 1592 6 51...

Страница 42: ...ak Integrity Models 822 824 826 827 1 X 10 4 atm cc sec of helium maximum Models 822 S 824 S 5 X 10 9 atm cc sec of helium maximum Pressure Drop Models 822 824 Flow Rate cm of Water mbar in H2O 100 sccm 0 06 0 06 0 024 1 slpm 0 6 0 59 0 236 10 slpm 6 0 5 88 2 36 20 slpm 24 0 23 5 9 45 30 slpm 54 0 53 21 3 40 slpm 96 0 94 7 37 8 50 slpm 130 0 127 4 51 2 Models 826 827 Two inches of mercury maximum ...

Страница 43: ...r or better Response Time 800 ms time constant six seconds typical to within 2 of final value over 25 to 100 of full scale Physical Specifications Wetted Materials 822 824 10 glass filled Nylon 6 6 316 stainless steel nickel plating Viton o rings standard Neoprene and 4079 Kal Rez or equivalent o rings optional 826 827 Anodized aluminum 316 stainless steel nickel plating Viton o rings standard Neo...

Страница 44: ...Series 820 Instruction Manual Appendix B Specifications IM 82 C B 3 ...

Страница 45: ...Appendix B Specifications Series 820 Instruction Manual B 4 IM 82 C ...

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