SevenStar PC100-D PC, Руководство пользователя

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All fittings of instrument must be matched according to the listing in manual. Please
read manual carefully before screwing tightly.
h) Please do leakage check.
Please check carefully all of vacuum parts and make sure that there is not leakage in
the system.
i) Please make sure that instrument is working under safe pressure.
Please make sure that the pressure of inlet gas is less than maximum working pressure.
j) Please keep the whole system away from pollution.
When system running, do not use polluting gas, such as particle of dust, dirt, fibre,
glass or scrap iron.
k) Please do warm-up instrument before working.
Please do warm-up instrument, especially in using dangerous gas. Please close valve
completely to make sure that there is not error flow.
1.4 General
Pressure controller (PC) accurately measures and controls mass flow rates, which is
widely applied in the fields as: semiconductor and IC fabrication, special materials science,
chemical industry, petrolic industry, pharmaceutical industry, environmental protecting and
vacuum system researching, etc.. The typical applications include: microelectronic process
equipment such as diffusion, oxidation, epitaxy, CVD, plasma etching, sputtering, ion
implantation, vacuum deposition equipment, optical fiber melting, micro-reaction
equipment, mixing & matching gas system, capillary flow pressure control system, gas
chromatograph and other analytical instruments.
The PC100-D PC is a latest generation PC for use in semiconductor applications and
demanding industrial uses where its high accuracy and flexibility in interfacing are
required.