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Operation control could accomplish by Flow Readout Box. When set point is turned on the “INT”, flow rate will be
under controlled by the presetting potentiometer; when setpoint is turned on the “EXT”, flow rate will be controlled
by set signal which is supplied by users.
There are three valves control switches on the panel of D08 series Flow Readout Box: CLOSE, PURGE and AUTO.
In case of CLOSE, Valves of MFC will shut off; in case of PURGE, Valve will open reach to the tip to purge the
Gas systems or could be functioned as a MFM; when set to AUTO, Valve can control the flow rate automatically.
4. INSTALLATION & CONNECTION
4.1 Dimension
Dimensions and installations are showing as following figure 3a
、
3b
、
3c
、
3d:
Figure 3a. Dimension of D07-60B MFC With 1/2
″
/
φ
10 Compression Fitting Fitting
