SevenStar D07-60B Скачать руководство пользователя страница 24

 

Page 21 of 26 

7.    TROUBLESHOOTING 

Table 3. Failure Handling   

NO. 

FAILURE   

CAUSE 

TREATMENT 

There  is  no  gas  flow 

after turn on.     

1.1    Gas  flow  is  shutting  off,  no  gas 

inputting 

Check the gas sourcing and make it open 

1.2    Valve control switch is shutoff 

Turn  the  switch  to  CONTROL  or 

PURGE 

1.3    No setting signal 

Check  potentiometer  or  “In/Out”  switch 

setting position 

1.4    Filter is blocked 

* Change a new filter 

1.5    Valve failure 

Test or *clean valve 

1.6    Circuit failure 

*Repair the electric circuit 

In  case  of  turning  on 

but  without  gas  flow, 

the  flow  rate  testing  is 

error. 

2.1    Zero excursion 

Adjust the zeroing potentiometer 

2.2    Power supply failure 

*Check Power supply voltages (24VDC)   

2.3    Sensor failure 

*Replace the new sensor 

2.4    Amplifier or other circuits failure 

*Replace amplifier or repair circuit 

 

In 

case 

of 

valve 

shutting  off,  there  is 

still  heavy  flow  rate 

passing. 

3.1    Over-  load  pressure  of  input 

outlet, the differential pressure between 

inlet and outlet is beyond rating. 

Reduce  the  inlet  operating  pressure  to 

decrease differential pressure. 

3.2    Pollution of valve 

*Clean valve and replace seal ring 

3.3    Valve failure 

*Re-adjust solenoid control valve 

The  flow  rate  display 

could  not  reach  to  full 

scale flow rate value. 

4.1    Pressure is lower than the rating 

Heighten the inlet pressure 

4.2    Block of bypass 

*Clean bypass 

4.3    Setting voltage is less than5.00V 

*Check the setting Voltage 

4.4    Others trouble 

*Repair circuit etc. 

 

Содержание D07-60B

Страница 1: ...D07 60B Mass Flow controller D07 60BM Mass Flow Meter INSTRUCTION MANUAL 2017 03...

Страница 2: ...this manual thoroughly before performing any operation This manual will enable the full information necessary for installation operation and ease of maintenance to be realized Should you require any a...

Страница 3: ...Connection 11 6 6 Operation Pressure Resistance 17 4 5 Zero Adjustment 13 6 7 Calibration and Conversion 17 5 OPERATION INSTRUCTIONS 14 6 8 D07 60B 60BM Ordering Code 18 5 1 MFC Operation 14 7 TROUBLE...

Страница 4: ...taxy CVD plasma etching sputtering ion implantation vacuum deposition equipment optical fiber melting micro reaction equipment mixing matching gas system capillary flow control system gas chromatograp...

Страница 5: ...erature 5 45 9 Input Signal 0 5 00 V Input Resistance 500K NO 10 Output Signal 0V 5 00 V Output Electric Current 3mA 11 Valve Type N C Solenoid NO 12 Power Supply 15V 50 mA 15V 200 mA 15V 50 mA 15V 50...

Страница 6: ...nsor heated the flow signal which was measured by electric bridge and amplified it through amplifier the amplified flow testing voltage is compared with presetting voltage the differential signal will...

Страница 7: ...he channels flow outputting signal is 0 5VDC The Flow control ranges of MFC is 2 100 F S flow resolving power is 0 1 F S Attention When Valve controller of MFC is posited on position of PURGE it can b...

Страница 8: ...valves control switches on the panel of D08 series Flow Readout Box CLOSE PURGE and AUTO In case of CLOSE Valves of MFC will shut off in case of PURGE Valve will open reach to the tip to purge the Gas...

Страница 9: ...Page 6 of 26 Flange D K L DIN DN15 PN40 95 65 14 DIN DN20 PN40 105 75 14 DIN DN25 PN40 115 85 14 Figure 3b Dimension of D07 60B MFC With Flange...

Страница 10: ...Page 7 of 26 Figure 3c Dimension of D07 60BM MFM With 1 2 10 Compression Fitting Fitting...

Страница 11: ...Figure 3d Dimension of D07 60BM MFC With Flange Attention The height of figure 3a 3b 3c 3d are height without electric connectors of cable It should be added around 50mm more after adding the electri...

Страница 12: ...gure 4 is an example to showing the fitting structure please be careful the flow input output direction should not be inversed fitted Figure 4 Compression Fitting Connector Installation Attention For...

Страница 13: ...tion of D07 60BM MFM Electrical Interfacing D07 60BM MFM electrical interfacings figure6 is as same as connector of D07 60B MFC only compared with MFC accessories that lacks of Valve Control and Setpo...

Страница 14: ...meter had settled it could be used a 3 3K multi turn potentiometer to connect to the external control signal socket of 5 00V and signal common It also could be directly connecting with modulus D A con...

Страница 15: ...common connects signal reference point low current common and heavy current power common down lead separately and connects together to the 15V power supply common port If users need PC performs AUTO O...

Страница 16: ...or adjust it while removed its overall Please note it should be sure that gas flow tube could not be open while zero adjustment or shutoff the valves it should be warming up not less than 15 minutes...

Страница 17: ...tches and flow setting potentiometer are in the front of Readout Box panel the flow setting internal or external signal control switches are on the back of panel of Readout Box When the switch is turn...

Страница 18: ...n overshooting 5 1 2 PURGE When need air blasting and cleaning bypass and tube users could turn the switch on PURGE position during the purging flow rate value should reach up to times or even several...

Страница 19: ...rosive Gas The materials of bypass are anti caustic materials like 00Cr17Ni14Mo2 same as 316Lstainless steel Teflon and Viton When users operate in condition of without vapor low leakage regular clean...

Страница 20: ...rage of specification of inlet and outlet Especially while operating under the high pressure situation the big differential pressure will affect flow fail to shut off or lower adjustment In case of us...

Страница 21: ...0 Mixture gases please consult d for detail r r r r Flow Range Full Scale 300L 300SLM 500L 500SLM 750L 750SLM 1K0L 1000SLM 1K5L 1500SLM 2K0L 2000SLM 000C Customer Special Request please consult d for...

Страница 22: ...B 300 1000SLM 0 25 0 50 MPa 1500 2000SLM 0 40 0 60 MPa D07 60BM 300 2000SLM 0 2MPa Max Operating Pressure 3 MPa Calibration Temperature 22 2 S Customer Special Requirements For Example The letters on...

Страница 23: ...cale 1000SLM Inlet and Outlet Fittings Compression Fitting 1 2 Seal Materials Viton Mounting Position Horizontal Customer Special Requirements For Example The letters on cover and Tag in English Diffe...

Страница 24: ...ter 2 2 Power supply failure Check Power supply voltages 24VDC 2 3 Sensor failure Replace the new sensor 2 4 Amplifier or other circuits failure Replace amplifier or repair circuit 3 In case of valve...

Страница 25: ...g 7 Flow display is in accurate 7 1 The range or unit of Display is not matching to controller Re adjust Display 7 2 Bypass is polluted to cause the flow rate excursion Clean MFC and re calibrate it 7...

Страница 26: ...and particle free which means a filter 30 must be fitted in the gas line upstream of the MFC MFM b Gas must comply with the pressure specifications and never exceed the rated value c Process gas shou...

Страница 27: ...0 5318 0 7150 0 719 C2H2 042 0 4049 1 1620 0 581 C2H4 038 0 3658 1 2510 0 598 C2H6 054 0 4241 1 3420 0 481 C3H4 068 0 3633 1 7870 0 421 C3H6 069 0 3659 1 8770 0 398 C3H8 089 0 3990 1 9670 0 348 C4H6...

Страница 28: ...0 Ne 002 0 2464 0 9000 1 415 NH3 029 0 5005 0 7600 0 719 NO 016 0 2378 1 3390 0 976 NO2 026 0 1923 2 0520 0 741 N2O 027 0 2098 1 9640 0 709 O2 015 0 2196 1 4270 0 992 PCl3 193 0 1247 6 1270 0 358 PH3...

Страница 29: ...heat of the gas N Structure factors of gas molecule See Table 6 Table 6 Gas Molecule Composing factors COMPOSITION EXAMPLE N VALUE Single atom numerator Ar He 1 01 Double atom numerator CO N2 1 00 Tr...

Страница 30: ...Rm 722 Bldg 29 No 368 Zhangjiang Rd Pudong New Area Shanghai China Tel 86 21 63532370 Fax 86 21 63533265 Shenzhen Office Room 712 Section B Qiche Tower No 45 Zhenhua Road Futian District Shenzhen Chin...

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