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INT
out
INLET
I
Bypass
Sensor
Ru
Rd
MASS FLOW
CONTROLLER
Power
Readout
100.0
~220V
+15V
Power Com.
-15V
Amplifier
+5.00V
+15V
Override
Valve
Valve
Drive
OUTLET
AUTO
PURGE
-15V
OFF
FLOW READOUT BOX
(0 ~ +5.00V)
Comparator
set
EXT
SET
(0 ~ +5.00V)
Signal Com.
Output
Setpoint
Figure2. Principle of MFC
The outputting flow testing signal from MFC is a direct ratio with the flow through the channels, flow outputting
signal is 0~5VDC. The Flow control ranges of MFC is (2~100) %F.S., flow resolving power is 0.1% F.S..
Attention:
When Valve controller of
MFC is posited on position of “PURGE”, it can be functioned as a MFM. In that
case, the maximum flow testing voltage could reach 10V, please be careful, while flow is beyond
F.S. +5V(Full Scale), the real flow will have no linearity corresponding
with flow testing voltage. While it’s
purging, flow display will be inaccurate, even showing “reduce” while the real flow is enhanced, please be
sure it’ll be no damaged to device itself.
