S
S
E
E
R
R
V
V
I
I
C
C
E
E
M
M
A
A
N
N
U
U
A
A
L
L
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ESIRIS -
- Version 1.0 Date: 22.09.00
Excimer-Laser
Laser principal:
Excimer gas lasers are stimulated with an electric pulse in a mixture
of rare gases and halogens. The output lifts the rare gas atoms to a higher energy
level, so that they reacts with the halogen molecules and connect, as ArF, XeCI or
KrCI. These special molecules, known as excimers, are stable only for a short time.
They destroy and put out a high ultraviolet beam. If the gas is arranged in an optical
resonator of two parallel mirrors, the laser effect is achieved and light impulses with
very high maximum outputs are beamed. The laser gas consumes itself partially
during the output and must be changed after 10 x 10
6
impulses or after 2-3 days.
The ‘OPTEX’ laser used with the
SCHWIND ESIRIS
is produced by Lambda Physik,
Goettingen. It is a very compact unit, which is optimised in reliability and low gas
consumption. Above mentioned specifications describe the data of the laser and the
necessary voltage connections.
Picture 1: Optex-Laser
Power supply voltage:
230 V AC +/-10 %, 1 Phase
Frequency:
50 Hz or 60 Hz
Power Input:
1.5 kVA
Security for the phase:
6.3 A
Device connections
acc. to IEC standard
