Q150T Sample Preparation System
Q150T - Instruction Manual
41
10473 - Issue 5
5.10
Aperture Cleaning
This process is designed to clean hydrocarbon contamination from SEM & TEM
apertures. It is only available with Q150T E/ES models equipped with the optional metal
evaporation insert.
1.
Fit the molybdenum boat source to the evaporation insert as described on page 59
.
2.
Choose the
QT aperture cleaning
profile from the list. Edit the profile and change
the current to 10A and the time to 5 minutes.
3.
Run the profile.
4.
When the coating unit has reached ‘HiVac’ and the current reads 10 A use the
stylus to slide the slider to the right or tap the Right Arrow button (
) to increase
the current gradually.
5.
Watch the metal boat and keep increasing the current until the boat glows cherry
red (see below). Make a note of the current.
Figure 5-7.
Aperture cleaning in progress
6.
Slide the Z slider back to the right until the current reads zero again, and terminate
the process.
7.
Create a new profile based on the QT aperture cleaning profile and save with a
new file name.
8.
Change the current to a value approximately 5-10 A below the point where the
boat was glowing cherry red. Change the time to 5 minutes and save the profile.
9.
Remove the head.
CAUTION: Take care when removing the head and aperture as
it will be very hot!
10.
Replace the head into the coater carefully.
11.
Load and run the profile that has just been created.
12.
When the current has reached the value set in the profile use the slider or tap the
Right Arrow button
to slowly increase the current until the boat is glowing cherry
red.
13.
Heat the aperture in the boat for approximately 30 seconds.
CAUTION: Do not take the current beyond the point where the
boat is no longer cherry red (i.e. bright yellow/white) as this
will damage the aperture.
14.
After 30 seconds either slide the slider to the left or tap the Z button to zero the
current. The boat will stop glowing.
15.
Reduce the current to 0 and terminate the process or wait until the process self
terminates after 5 minutes.
CAUTION: Take care when removing the head and aperture as
it will be very hot!
Содержание Q150T S
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