Preiffer PKR 251, Руководство по эксплуатации

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15 Technical data and dimensions
15.1 General
mbar bar Pa hPa kPa Torr | mm Hg
mbar 1 1 · 10 -3 100 1 0.1 0.75
bar 1000 1
1 · 10 5
1000 100 750
Pa 0.01
1 · 10 -5
1 0.01
1 · 10 -3 7.5 · 10 -3
hPa 1
1 · 10 -3
100 1 0.1 0.75
kPa 10 0.01 1000 10 1 7.5
Torr | mm Hg 1.33
1.33 · 10 -3
133.32 1.33 0.133 1
1 Pa = 1 N/m 2
Tbl. 10: Conversion table: Pressure units
mbar l/s
Pa m 3 /s
sccm Torr l/s
atm cm 3 /s
mbar l/s 1 0.1 59.2 0.75 0.987
Pa m 3 /s
10 1 592 7.5 9.87
sccm
1.69 · 10 -2 1.69 · 10 -3
1
1.27 · 10 -2 1.67 · 10 -2
Torr l/s 1.33 0.133 78.9 1 1.32
atm cm 3 /s 1.01 0.101 59.8 0.76 1
Tbl. 11: Conversion table: Units for gas throughput
15.2 Technical data
Parameter Value
Measuring range (air, N
2
) 5 × 10 -9 – 1000 hPa
Maximum pressure (absolute) 10000 hPa, limited to inert gases and temperatures < 55 °C
Measuring principle Pirani/cold cathode
Accuracy
approx. ±30 % in the range of 1 × 10 -8 – 100 hPa
Repeatability
approx. ±5 % in the range of 1 × 10
-8
– 100 hPa
Gauge calibration (HV)
(Pirani measuring system)
at < 1 × 10 -4 hPa (while simultaneously pressing the button)
Gauge calibration (ATM)
(Pirani measuring system) at atmospheric pressure
Tbl. 12: Measured and pressure values
Parameter Value
Output signal (measur-
ing signal)
Voltage range approx. 0 V – approx. +10,5 V
Error signal < 0.5 V (no supply)
> 9.5 V (Pirani measuring element de-
fective; broken filament)
Relation voltage-pressure logarithmic, rise 0.6 V/decade
Output impedance 2 × 10 Ω
Load impedance (minimum load) 10 kΩ, short-circuit proof
Response time pressure-dependent
p > 10
-6
hPa
approx. 10 ms
p = 10 -8 hPa
approx. 1 s
Technical data and dimensions
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