Preiffer PKR 251, Руководство по эксплуатации

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p [hPa]
10
2
8
6
4
2
10 1
8
6
4
2
10 0
8
6
4
2
10 –1
8
6
4
2
10
–2
H
2
He Ne
Air
N
2
O
2
CO
10 –3
2 4 6
10 –2 10 –1 10 0 10 1 10 2
8 2 4 6 8 2 4 6 8 2 4 6 8 2 4 6 8
Water vapor
p
eff
[hPa]
Xe
Kr
Ar
CO
2
Freon 12
Fig. 8:
Pressure range > 10 -2 hPa, Pirani operation only
6
4
2
6
4
2
6
4
2
10 –4
8
6
4
2
10
–6
2 4 6
10
–5
10
–4
Ar
10 –5
8
6
4
2
10 –6
8 2 4 6 8 2 4 6 2 4 6 2 4 6
10
–3
8
10
–2
8
10
–1
8
10 –3
8
10 –2
8
10
–1
8
p
eff
[hPa]
p [hPa]
Air
N
2
O
2
CO
He
Fig. 9: Pressure range from 10 -6 to 0.1 hPa
Operation
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