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8.2 Disassembling gauge
NOTICE
Impairment from contamination and damage
Touching the devices or components with bare hands increases the desorption rate and leads to in-
correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function.
► When working on high or ultra high vacuum systems, always wear clean, lint-free and powder-
free laboratory gloves.
► Only use clean tools.
► Make sure that the connection flanges are free of grease.
► Remove protective caps and protective covers from flanges and connections only when necessa-
ry.
► Carry out all work in a well lit area.
Required tools
● Allen key,
WAF 1.5
● Allen key,
WAF 3
● Open-end wrench,
WAF 7
● Pincers for circlip
● Tweezers
2
1
15
16
14
13
12
5
6
11
8
9
10
4
3
7
Fig. 13:
Individual parts
1 Electronic unit
9
Ignition aid
2 Grub screw
10
FPM seal (anode bushing)
3 FPM seal (Pirani measuring element)
11
Inner ring
4 Pirani measurement element
12
Circlip
5 Lock washer (3×)
13
Pin insert
6 Interior hexagon socket screw (3×)
14
Measurement chamber
7 Compression piece
15
Hexagon head set screw
8 Anode
16
Magnetic unit
Disassembling gauge
1. Remove the gauge from the vacuum system.
2. Loosen the grub screw on the side of the electronic unit.
Maintenance
31/50
Содержание PKR 251
Страница 1: ...OPERATING INSTRUCTIONS EN Translation of the Original PKR 251 Pirani Cold cathode gauge...
Страница 49: ...49 50...
Страница 50: ...BG5155 ed D Date 2206 P N BG5155BEN...