20
Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
Locking pin
Figure 7, Front cap for sample chamber. Two locking pins will mate with two locking
slots on the door. Rotate the from cap in CW direction to lock the door. Rotate the
front cap in CCW direction to unlock the door.
Power switch
Fuse box
AC power entry,
connects to
utility AC
NW25 pumping
port
Figure 8, backside of the Tergeo plasma cleaner
Pump power outlet.
Connects to pump
Pump power
inlet, connects to
utility power.
Venting port with an
optional dust particle filter
Process gas input
If the untreated room air is directly used to vent the chamber or to be
used as the process gas on MFCs to generate the plasma, the dust
particles in the room air may land on the sealing surface inside the vent
valve or the MFCs. Dust will create the vacuum leak issue. Please use
treated clean air (CDA) or nitrogen to vent the chamber. If treated
clean air line or nitrogen line is not available, please contact PIE
Scientific LLC to buy a room air dust particle filter.
RS232 communi-
cation port
