PI P-73 Series, Руководство пользователя

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1 About this Document 1
1.1 Goal and Target Audience of this User Manual ................................................... 1
1.2 Symbols and Typographic Conventions ............................................................... 1
1.3 Other Applicable Documents ................................................................................ 2
1.4 Downloading Manuals .......................................................................................... 3
2 Safety 5
2.1 Intended Use ........................................................................................................ 5
2.2 General Safety Instructions .................................................................................. 6
2.3 Organizational Measures ...................................................................................... 7
3 Product Description 9
3.1 Features and Applications .................................................................................... 9
3.2 Model Overview ..................................................................................................10
3.2.1 Piezo XY Stage.................................................................................10
3.2.2 Piezo XYZ Stage ..............................................................................10
3.2.3 Precision Z Stage .............................................................................11
3.3 Product View.......................................................................................................11
3.4 Scope of Delivery ...............................................................................................12
3.5 Technical Features .............................................................................................12
3.5.1 PICMA® Piezo Actuators .................................................................12
3.5.2 Flexure Guides .................................................................................12
3.5.3 Capacitive Sensors ...........................................................................13
3.5.4 ID Chip (Only Models with Sub-D Connector) ..................................13
4 Unpacking 15
5 Installation 17
5.1 General Notes on Installation .............................................................................17
5.2 Connecting the P-73x to a Protective Earth Conductor .....................................19
5.3 Mounting the P-73x ............................................................................................21
5.4 Affixing the Load .................................................................................................23
6 Start-up and Operation 27
6.1 General Notes on Start-Up and Operation .........................................................27
6.2 Operating the P-73x ...........................................................................................30
6.3 Discharging the P-73x ........................................................................................30
Contents